JPH0625013Y2 - ウエハ位置決め装置 - Google Patents

ウエハ位置決め装置

Info

Publication number
JPH0625013Y2
JPH0625013Y2 JP8291788U JP8291788U JPH0625013Y2 JP H0625013 Y2 JPH0625013 Y2 JP H0625013Y2 JP 8291788 U JP8291788 U JP 8291788U JP 8291788 U JP8291788 U JP 8291788U JP H0625013 Y2 JPH0625013 Y2 JP H0625013Y2
Authority
JP
Japan
Prior art keywords
wafer
center
sliders
slider
pulse motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP8291788U
Other languages
English (en)
Japanese (ja)
Other versions
JPH028039U (enrdf_load_stackoverflow
Inventor
寛 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP8291788U priority Critical patent/JPH0625013Y2/ja
Publication of JPH028039U publication Critical patent/JPH028039U/ja
Application granted granted Critical
Publication of JPH0625013Y2 publication Critical patent/JPH0625013Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Control Of Position Or Direction (AREA)
JP8291788U 1988-06-24 1988-06-24 ウエハ位置決め装置 Expired - Lifetime JPH0625013Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8291788U JPH0625013Y2 (ja) 1988-06-24 1988-06-24 ウエハ位置決め装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8291788U JPH0625013Y2 (ja) 1988-06-24 1988-06-24 ウエハ位置決め装置

Publications (2)

Publication Number Publication Date
JPH028039U JPH028039U (enrdf_load_stackoverflow) 1990-01-18
JPH0625013Y2 true JPH0625013Y2 (ja) 1994-06-29

Family

ID=31307652

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8291788U Expired - Lifetime JPH0625013Y2 (ja) 1988-06-24 1988-06-24 ウエハ位置決め装置

Country Status (1)

Country Link
JP (1) JPH0625013Y2 (enrdf_load_stackoverflow)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60174113U (ja) * 1984-04-25 1985-11-18 松下電工株式会社 照明器具のセ−ド取付装置
JPH0416950U (enrdf_load_stackoverflow) * 1990-06-01 1992-02-12
JP3578593B2 (ja) * 1997-06-04 2004-10-20 東京エレクトロン株式会社 基板整列装置
JP3892992B2 (ja) * 1999-06-21 2007-03-14 Ｈｏｙａ株式会社 眼鏡レンズのセンタリング装置
JP4603209B2 (ja) * 2001-08-23 2010-12-22 株式会社アドバンテスト ウエハ搬送用の位置決め固定装置
CN110838460B (zh) * 2018-08-15 2023-08-22 致茂电子股份有限公司 晶片旋转暂置台
JP7335076B2 (ja) * 2019-01-30 2023-08-29 株式会社東京精密 ワーク載置台
CN115179078A (zh) * 2022-07-27 2022-10-14 江苏恒升兴液压机械有限公司 一种电机壳加工用夹具
CN115356342B (zh) * 2022-09-22 2025-08-22 芜湖博康汽车饰件有限公司 一种汽车内饰件总成组装定位台

Also Published As

Publication number Publication date
JPH028039U (enrdf_load_stackoverflow) 1990-01-18

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