JPH0623945Y2 - 質量流量制御装置 - Google Patents

質量流量制御装置

Info

Publication number
JPH0623945Y2
JPH0623945Y2 JP5500989U JP5500989U JPH0623945Y2 JP H0623945 Y2 JPH0623945 Y2 JP H0623945Y2 JP 5500989 U JP5500989 U JP 5500989U JP 5500989 U JP5500989 U JP 5500989U JP H0623945 Y2 JPH0623945 Y2 JP H0623945Y2
Authority
JP
Japan
Prior art keywords
passage
main passage
flow rate
fluid
mass flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP5500989U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0321736U (enrdf_load_stackoverflow
Inventor
憲一 五島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CKD Corp
Original Assignee
CKD Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CKD Corp filed Critical CKD Corp
Priority to JP5500989U priority Critical patent/JPH0623945Y2/ja
Publication of JPH0321736U publication Critical patent/JPH0321736U/ja
Application granted granted Critical
Publication of JPH0623945Y2 publication Critical patent/JPH0623945Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
  • Flow Control (AREA)
JP5500989U 1989-05-13 1989-05-13 質量流量制御装置 Expired - Lifetime JPH0623945Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5500989U JPH0623945Y2 (ja) 1989-05-13 1989-05-13 質量流量制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5500989U JPH0623945Y2 (ja) 1989-05-13 1989-05-13 質量流量制御装置

Publications (2)

Publication Number Publication Date
JPH0321736U JPH0321736U (enrdf_load_stackoverflow) 1991-03-05
JPH0623945Y2 true JPH0623945Y2 (ja) 1994-06-22

Family

ID=31577580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5500989U Expired - Lifetime JPH0623945Y2 (ja) 1989-05-13 1989-05-13 質量流量制御装置

Country Status (1)

Country Link
JP (1) JPH0623945Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101485753B1 (ko) * 2014-08-26 2015-01-22 김태영 자전거용 안전 브레이크 장치

Also Published As

Publication number Publication date
JPH0321736U (enrdf_load_stackoverflow) 1991-03-05

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term