JPH0623571Y2 - プラズマｃｖｄ装置 - Google Patents

プラズマｃｖｄ装置

Info

Publication number
JPH0623571Y2
JPH0623571Y2 JP13415689U JP13415689U JPH0623571Y2 JP H0623571 Y2 JPH0623571 Y2 JP H0623571Y2 JP 13415689 U JP13415689 U JP 13415689U JP 13415689 U JP13415689 U JP 13415689U JP H0623571 Y2 JPH0623571 Y2 JP H0623571Y2
Authority
JP
Japan
Prior art keywords
magnet
cylindrical
magnetic field
pole
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP13415689U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0374662U (enExample
Inventor
博信 辻本
一幸 後藤
敏彦 平谷
猛夫 深津
靖雄 岸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP13415689U priority Critical patent/JPH0623571Y2/ja
Publication of JPH0374662U publication Critical patent/JPH0374662U/ja
Application granted granted Critical
Publication of JPH0623571Y2 publication Critical patent/JPH0623571Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Photoreceptors In Electrophotography (AREA)
  • Chemical Vapour Deposition (AREA)
JP13415689U 1989-11-17 1989-11-17 プラズマｃｖｄ装置 Expired - Fee Related JPH0623571Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13415689U JPH0623571Y2 (ja) 1989-11-17 1989-11-17 プラズマｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13415689U JPH0623571Y2 (ja) 1989-11-17 1989-11-17 プラズマｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPH0374662U JPH0374662U (enExample) 1991-07-26
JPH0623571Y2 true JPH0623571Y2 (ja) 1994-06-22

Family

ID=31681515

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13415689U Expired - Fee Related JPH0623571Y2 (ja) 1989-11-17 1989-11-17 プラズマｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPH0623571Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5880474B2 (ja) * 2013-03-01 2016-03-09 株式会社デンソー 真空成膜装置

Also Published As

Publication number Publication date
JPH0374662U (enExample) 1991-07-26

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees