JPH0374662U - - Google Patents
Info
- Publication number
- JPH0374662U JPH0374662U JP13415689U JP13415689U JPH0374662U JP H0374662 U JPH0374662 U JP H0374662U JP 13415689 U JP13415689 U JP 13415689U JP 13415689 U JP13415689 U JP 13415689U JP H0374662 U JPH0374662 U JP H0374662U
- Authority
- JP
- Japan
- Prior art keywords
- magnet
- plasma
- annular
- annular electrodes
- cylindrical base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Photoreceptors In Electrophotography (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13415689U JPH0623571Y2 (ja) | 1989-11-17 | 1989-11-17 | プラズマcvd装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13415689U JPH0623571Y2 (ja) | 1989-11-17 | 1989-11-17 | プラズマcvd装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0374662U true JPH0374662U (enExample) | 1991-07-26 |
| JPH0623571Y2 JPH0623571Y2 (ja) | 1994-06-22 |
Family
ID=31681515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13415689U Expired - Fee Related JPH0623571Y2 (ja) | 1989-11-17 | 1989-11-17 | プラズマcvd装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0623571Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014169469A (ja) * | 2013-03-01 | 2014-09-18 | Denso Corp | 真空成膜装置 |
-
1989
- 1989-11-17 JP JP13415689U patent/JPH0623571Y2/ja not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014169469A (ja) * | 2013-03-01 | 2014-09-18 | Denso Corp | 真空成膜装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0623571Y2 (ja) | 1994-06-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |