JPH0374661U - - Google Patents
Info
- Publication number
- JPH0374661U JPH0374661U JP13415589U JP13415589U JPH0374661U JP H0374661 U JPH0374661 U JP H0374661U JP 13415589 U JP13415589 U JP 13415589U JP 13415589 U JP13415589 U JP 13415589U JP H0374661 U JPH0374661 U JP H0374661U
- Authority
- JP
- Japan
- Prior art keywords
- magnet
- plasma
- annular
- annular electrodes
- cylindrical base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13415589U JPH0374661U (enExample) | 1989-11-17 | 1989-11-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13415589U JPH0374661U (enExample) | 1989-11-17 | 1989-11-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0374661U true JPH0374661U (enExample) | 1991-07-26 |
Family
ID=31681514
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13415589U Pending JPH0374661U (enExample) | 1989-11-17 | 1989-11-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0374661U (enExample) |
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1989
- 1989-11-17 JP JP13415589U patent/JPH0374661U/ja active Pending