JPH0623566Y2 - 半導体製造装置 - Google Patents

半導体製造装置

Info

Publication number
JPH0623566Y2
JPH0623566Y2 JP2098090U JP2098090U JPH0623566Y2 JP H0623566 Y2 JPH0623566 Y2 JP H0623566Y2 JP 2098090 U JP2098090 U JP 2098090U JP 2098090 U JP2098090 U JP 2098090U JP H0623566 Y2 JPH0623566 Y2 JP H0623566Y2
Authority
JP
Japan
Prior art keywords
valve
opening
gas
closing
gas supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2098090U
Other languages
English (en)
Japanese (ja)
Other versions
JPH03111562U (enrdf_load_stackoverflow
Inventor
堅二 小山
幸雄 勝又
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP2098090U priority Critical patent/JPH0623566Y2/ja
Publication of JPH03111562U publication Critical patent/JPH03111562U/ja
Application granted granted Critical
Publication of JPH0623566Y2 publication Critical patent/JPH0623566Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP2098090U 1990-02-28 1990-02-28 半導体製造装置 Expired - Lifetime JPH0623566Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2098090U JPH0623566Y2 (ja) 1990-02-28 1990-02-28 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2098090U JPH0623566Y2 (ja) 1990-02-28 1990-02-28 半導体製造装置

Publications (2)

Publication Number Publication Date
JPH03111562U JPH03111562U (enrdf_load_stackoverflow) 1991-11-14
JPH0623566Y2 true JPH0623566Y2 (ja) 1994-06-22

Family

ID=31524059

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2098090U Expired - Lifetime JPH0623566Y2 (ja) 1990-02-28 1990-02-28 半導体製造装置

Country Status (1)

Country Link
JP (1) JPH0623566Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH03111562U (enrdf_load_stackoverflow) 1991-11-14

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