JPH0622980Y2 - Ｃｖｄ装置における基板支持装置 - Google Patents

Ｃｖｄ装置における基板支持装置

Info

Publication number
JPH0622980Y2
JPH0622980Y2 JP1988125645U JP12564588U JPH0622980Y2 JP H0622980 Y2 JPH0622980 Y2 JP H0622980Y2 JP 1988125645 U JP1988125645 U JP 1988125645U JP 12564588 U JP12564588 U JP 12564588U JP H0622980 Y2 JPH0622980 Y2 JP H0622980Y2
Authority
JP
Japan
Prior art keywords
substrate
opening
support plate
supporting
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1988125645U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0247029U (enrdf_load_stackoverflow
Inventor
光利 首藤
Original Assignee
日本エー・エス・エム株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本エー・エス・エム株式会社 filed Critical 日本エー・エス・エム株式会社
Priority to JP1988125645U priority Critical patent/JPH0622980Y2/ja
Publication of JPH0247029U publication Critical patent/JPH0247029U/ja
Application granted granted Critical
Publication of JPH0622980Y2 publication Critical patent/JPH0622980Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP1988125645U 1988-09-28 1988-09-28 Ｃｖｄ装置における基板支持装置 Expired - Fee Related JPH0622980Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988125645U JPH0622980Y2 (ja) 1988-09-28 1988-09-28 Ｃｖｄ装置における基板支持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988125645U JPH0622980Y2 (ja) 1988-09-28 1988-09-28 Ｃｖｄ装置における基板支持装置

Publications (2)

Publication Number Publication Date
JPH0247029U JPH0247029U (enrdf_load_stackoverflow) 1990-03-30
JPH0622980Y2 true JPH0622980Y2 (ja) 1994-06-15

Family

ID=31376432

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988125645U Expired - Fee Related JPH0622980Y2 (ja) 1988-09-28 1988-09-28 Ｃｖｄ装置における基板支持装置

Country Status (1)

Country Link
JP (1) JPH0622980Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2006118215A1 (ja) * 2005-04-28 2008-12-18 株式会社日立国際電気 基板処理装置および半導体デバイスの製造方法
CN116635568A (zh) * 2020-12-21 2023-08-22 株式会社国际电气 基板处理装置、基板保持件、半导体装置的制造方法以及程序

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52139766U (enrdf_load_stackoverflow) * 1976-04-16 1977-10-22
JPS5376396A (en) * 1976-12-18 1978-07-06 Agency Of Ind Science & Technol Base plate securing jig for liquid phase epitaxial growth
JPS57164524A (en) * 1981-04-02 1982-10-09 Toshiba Corp Vapor reaction for semiconductor wafer
JPS58108735A (ja) * 1981-12-23 1983-06-28 Fujitsu Ltd 縦型反応管用バスケツト
JPS59117138U (ja) * 1983-01-27 1984-08-07 日本電気ホームエレクトロニクス株式会社 半導体製造装置
JPS611017A (ja) * 1984-06-13 1986-01-07 Kokusai Electric Co Ltd 半導体基板の熱処理装置
JPS6252929U (enrdf_load_stackoverflow) * 1985-09-21 1987-04-02
JPS62142839U (enrdf_load_stackoverflow) * 1986-03-04 1987-09-09
JPS633155Y2 (enrdf_load_stackoverflow) * 1987-03-12 1988-01-26
JPH0727870B2 (ja) * 1987-12-24 1995-03-29 東横化学株式会社 減圧気相成長方法

Also Published As

Publication number Publication date
JPH0247029U (enrdf_load_stackoverflow) 1990-03-30

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