JPH062272Y2 - ウェーハ容器の上部緩衝板 - Google Patents

ウェーハ容器の上部緩衝板

Info

Publication number
JPH062272Y2
JPH062272Y2 JP2423788U JP2423788U JPH062272Y2 JP H062272 Y2 JPH062272 Y2 JP H062272Y2 JP 2423788 U JP2423788 U JP 2423788U JP 2423788 U JP2423788 U JP 2423788U JP H062272 Y2 JPH062272 Y2 JP H062272Y2
Authority
JP
Japan
Prior art keywords
wafer
buffer plate
elastic
upper buffer
pieces
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2423788U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01129836U (enrdf_load_stackoverflow
Inventor
忠三郎 大塚
敏嗣 矢島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Polymer Co Ltd
Original Assignee
Shin Etsu Polymer Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Polymer Co Ltd filed Critical Shin Etsu Polymer Co Ltd
Priority to JP2423788U priority Critical patent/JPH062272Y2/ja
Publication of JPH01129836U publication Critical patent/JPH01129836U/ja
Application granted granted Critical
Publication of JPH062272Y2 publication Critical patent/JPH062272Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP2423788U 1988-02-25 1988-02-25 ウェーハ容器の上部緩衝板 Expired - Lifetime JPH062272Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2423788U JPH062272Y2 (ja) 1988-02-25 1988-02-25 ウェーハ容器の上部緩衝板

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2423788U JPH062272Y2 (ja) 1988-02-25 1988-02-25 ウェーハ容器の上部緩衝板

Publications (2)

Publication Number Publication Date
JPH01129836U JPH01129836U (enrdf_load_stackoverflow) 1989-09-04
JPH062272Y2 true JPH062272Y2 (ja) 1994-01-19

Family

ID=31243919

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2423788U Expired - Lifetime JPH062272Y2 (ja) 1988-02-25 1988-02-25 ウェーハ容器の上部緩衝板

Country Status (1)

Country Link
JP (1) JPH062272Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119343766A (zh) * 2022-05-31 2025-01-21 未来儿股份有限公司 基板收纳容器以及盖体侧基板支承部
WO2024252672A1 (ja) * 2023-06-09 2024-12-12 ミライアル株式会社 基板収納容器

Also Published As

Publication number Publication date
JPH01129836U (enrdf_load_stackoverflow) 1989-09-04

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