JPH01129836U - - Google Patents

Info

Publication number
JPH01129836U
JPH01129836U JP2423788U JP2423788U JPH01129836U JP H01129836 U JPH01129836 U JP H01129836U JP 2423788 U JP2423788 U JP 2423788U JP 2423788 U JP2423788 U JP 2423788U JP H01129836 U JPH01129836 U JP H01129836U
Authority
JP
Japan
Prior art keywords
locking piece
buffer plate
upper buffer
piece
elastic piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2423788U
Other languages
English (en)
Japanese (ja)
Other versions
JPH062272Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2423788U priority Critical patent/JPH062272Y2/ja
Publication of JPH01129836U publication Critical patent/JPH01129836U/ja
Application granted granted Critical
Publication of JPH062272Y2 publication Critical patent/JPH062272Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Packaging Frangible Articles (AREA)
JP2423788U 1988-02-25 1988-02-25 ウェーハ容器の上部緩衝板 Expired - Lifetime JPH062272Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2423788U JPH062272Y2 (ja) 1988-02-25 1988-02-25 ウェーハ容器の上部緩衝板

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2423788U JPH062272Y2 (ja) 1988-02-25 1988-02-25 ウェーハ容器の上部緩衝板

Publications (2)

Publication Number Publication Date
JPH01129836U true JPH01129836U (enrdf_load_stackoverflow) 1989-09-04
JPH062272Y2 JPH062272Y2 (ja) 1994-01-19

Family

ID=31243919

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2423788U Expired - Lifetime JPH062272Y2 (ja) 1988-02-25 1988-02-25 ウェーハ容器の上部緩衝板

Country Status (1)

Country Link
JP (1) JPH062272Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023233554A1 (ja) * 2022-05-31 2023-12-07 ミライアル株式会社 基板収納容器及び蓋体側基板支持部
WO2024252672A1 (ja) * 2023-06-09 2024-12-12 ミライアル株式会社 基板収納容器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023233554A1 (ja) * 2022-05-31 2023-12-07 ミライアル株式会社 基板収納容器及び蓋体側基板支持部
WO2024252672A1 (ja) * 2023-06-09 2024-12-12 ミライアル株式会社 基板収納容器

Also Published As

Publication number Publication date
JPH062272Y2 (ja) 1994-01-19

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