JPH062263Y2 - 乾燥装置 - Google Patents
乾燥装置Info
- Publication number
- JPH062263Y2 JPH062263Y2 JP1986198341U JP19834186U JPH062263Y2 JP H062263 Y2 JPH062263 Y2 JP H062263Y2 JP 1986198341 U JP1986198341 U JP 1986198341U JP 19834186 U JP19834186 U JP 19834186U JP H062263 Y2 JPH062263 Y2 JP H062263Y2
- Authority
- JP
- Japan
- Prior art keywords
- dried
- solvent
- drying
- heat source
- drying device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001035 drying Methods 0.000 claims description 31
- 239000002904 solvent Substances 0.000 claims description 25
- 238000010438 heat treatment Methods 0.000 claims description 11
- 239000007788 liquid Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 description 26
- 235000012431 wafers Nutrition 0.000 description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
- 229910052710 silicon Inorganic materials 0.000 description 11
- 239000010703 silicon Substances 0.000 description 11
- 239000010419 fine particle Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 239000012535 impurity Substances 0.000 description 4
- 238000005406 washing Methods 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 238000007689 inspection Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910021642 ultra pure water Inorganic materials 0.000 description 2
- 239000012498 ultrapure water Substances 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 229960004592 isopropanol Drugs 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986198341U JPH062263Y2 (ja) | 1986-12-25 | 1986-12-25 | 乾燥装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986198341U JPH062263Y2 (ja) | 1986-12-25 | 1986-12-25 | 乾燥装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63105329U JPS63105329U (enrdf_load_stackoverflow) | 1988-07-08 |
| JPH062263Y2 true JPH062263Y2 (ja) | 1994-01-19 |
Family
ID=31158938
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986198341U Expired - Lifetime JPH062263Y2 (ja) | 1986-12-25 | 1986-12-25 | 乾燥装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH062263Y2 (enrdf_load_stackoverflow) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58222528A (ja) * | 1982-06-21 | 1983-12-24 | Hitachi Ltd | ウエハ乾燥装置 |
| JPS6166937U (enrdf_load_stackoverflow) * | 1984-10-08 | 1986-05-08 | ||
| JPH058676Y2 (enrdf_load_stackoverflow) * | 1985-03-11 | 1993-03-04 | ||
| JPS61237430A (ja) * | 1985-04-15 | 1986-10-22 | Wakomu:Kk | 半導体蒸気乾燥洗浄用石英容器 |
| JP2511873B2 (ja) * | 1986-04-18 | 1996-07-03 | 株式会社日立製作所 | ベ−パ乾燥装置 |
-
1986
- 1986-12-25 JP JP1986198341U patent/JPH062263Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63105329U (enrdf_load_stackoverflow) | 1988-07-08 |
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