JPH0621236Y2 - 半導体基板の洗浄装置 - Google Patents

半導体基板の洗浄装置

Info

Publication number
JPH0621236Y2
JPH0621236Y2 JP1985047578U JP4757885U JPH0621236Y2 JP H0621236 Y2 JPH0621236 Y2 JP H0621236Y2 JP 1985047578 U JP1985047578 U JP 1985047578U JP 4757885 U JP4757885 U JP 4757885U JP H0621236 Y2 JPH0621236 Y2 JP H0621236Y2
Authority
JP
Japan
Prior art keywords
ozone
cleaning
semiconductor substrate
pipe
tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985047578U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61164030U (cg-RX-API-DMAC10.html
Inventor
利明 村谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP1985047578U priority Critical patent/JPH0621236Y2/ja
Publication of JPS61164030U publication Critical patent/JPS61164030U/ja
Application granted granted Critical
Publication of JPH0621236Y2 publication Critical patent/JPH0621236Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP1985047578U 1985-03-28 1985-03-28 半導体基板の洗浄装置 Expired - Lifetime JPH0621236Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985047578U JPH0621236Y2 (ja) 1985-03-28 1985-03-28 半導体基板の洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985047578U JPH0621236Y2 (ja) 1985-03-28 1985-03-28 半導体基板の洗浄装置

Publications (2)

Publication Number Publication Date
JPS61164030U JPS61164030U (cg-RX-API-DMAC10.html) 1986-10-11
JPH0621236Y2 true JPH0621236Y2 (ja) 1994-06-01

Family

ID=30563034

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985047578U Expired - Lifetime JPH0621236Y2 (ja) 1985-03-28 1985-03-28 半導体基板の洗浄装置

Country Status (1)

Country Link
JP (1) JPH0621236Y2 (cg-RX-API-DMAC10.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2711389B2 (ja) * 1987-08-28 1998-02-10 ユー，エス，フィルター／アローヘッド、インコーポレイテッド 集積回路製作方法
JPH07114191B2 (ja) * 1990-11-14 1995-12-06 株式会社荏原総合研究所 洗浄方法
JP2000286220A (ja) * 1999-01-29 2000-10-13 Dainippon Screen Mfg Co Ltd 基板処理装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5212063A (en) * 1975-07-15 1977-01-29 Matsushita Electric Works Ltd Hair curling apparatus
JPS6039240U (ja) * 1983-08-24 1985-03-19 ウシオ電機株式会社 紫外線洗浄装置

Also Published As

Publication number Publication date
JPS61164030U (cg-RX-API-DMAC10.html) 1986-10-11

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