JPH0612825Y2 - 蒸発器 - Google Patents
蒸発器Info
- Publication number
- JPH0612825Y2 JPH0612825Y2 JP2255089U JP2255089U JPH0612825Y2 JP H0612825 Y2 JPH0612825 Y2 JP H0612825Y2 JP 2255089 U JP2255089 U JP 2255089U JP 2255089 U JP2255089 U JP 2255089U JP H0612825 Y2 JPH0612825 Y2 JP H0612825Y2
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- sealed chamber
- liquid
- liquid raw
- vaporized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002994 raw material Substances 0.000 claims description 81
- 239000007788 liquid Substances 0.000 claims description 50
- 238000010438 heat treatment Methods 0.000 claims description 21
- 230000002093 peripheral effect Effects 0.000 claims description 7
- 238000002347 injection Methods 0.000 claims description 4
- 239000007924 injection Substances 0.000 claims description 4
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 29
- 239000007789 gas Substances 0.000 description 19
- 239000004065 semiconductor Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 8
- 230000008016 vaporization Effects 0.000 description 7
- 238000009834 vaporization Methods 0.000 description 5
- 230000005587 bubbling Effects 0.000 description 4
- 239000012159 carrier gas Substances 0.000 description 4
- 239000001307 helium Substances 0.000 description 4
- 229910052734 helium Inorganic materials 0.000 description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011344 liquid material Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000001846 repelling effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
Landscapes
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2255089U JPH0612825Y2 (ja) | 1989-02-28 | 1989-02-28 | 蒸発器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2255089U JPH0612825Y2 (ja) | 1989-02-28 | 1989-02-28 | 蒸発器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02112328U JPH02112328U (enrdf_load_stackoverflow) | 1990-09-07 |
| JPH0612825Y2 true JPH0612825Y2 (ja) | 1994-04-06 |
Family
ID=31240770
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2255089U Expired - Lifetime JPH0612825Y2 (ja) | 1989-02-28 | 1989-02-28 | 蒸発器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0612825Y2 (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3415862B2 (ja) * | 1992-07-06 | 2003-06-09 | 株式会社フジクラ | Ｃｖｄ原料気化装置 |
| JP2872891B2 (ja) * | 1993-08-06 | 1999-03-24 | 株式会社東芝 | 気化装置 |
-
1989
- 1989-02-28 JP JP2255089U patent/JPH0612825Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02112328U (enrdf_load_stackoverflow) | 1990-09-07 |
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