JPH0612605Y2 - イオン注入装置用エンドステ−シヨン - Google Patents

イオン注入装置用エンドステ−シヨン

Info

Publication number
JPH0612605Y2
JPH0612605Y2 JP1985005293U JP529385U JPH0612605Y2 JP H0612605 Y2 JPH0612605 Y2 JP H0612605Y2 JP 1985005293 U JP1985005293 U JP 1985005293U JP 529385 U JP529385 U JP 529385U JP H0612605 Y2 JPH0612605 Y2 JP H0612605Y2
Authority
JP
Japan
Prior art keywords
wafer
chamber
end station
airlock
transfer belt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985005293U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61121654U (enrdf_load_stackoverflow
Inventor
司 野上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP1985005293U priority Critical patent/JPH0612605Y2/ja
Publication of JPS61121654U publication Critical patent/JPS61121654U/ja
Application granted granted Critical
Publication of JPH0612605Y2 publication Critical patent/JPH0612605Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1985005293U 1985-01-17 1985-01-17 イオン注入装置用エンドステ−シヨン Expired - Lifetime JPH0612605Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985005293U JPH0612605Y2 (ja) 1985-01-17 1985-01-17 イオン注入装置用エンドステ−シヨン

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985005293U JPH0612605Y2 (ja) 1985-01-17 1985-01-17 イオン注入装置用エンドステ−シヨン

Publications (2)

Publication Number Publication Date
JPS61121654U JPS61121654U (enrdf_load_stackoverflow) 1986-07-31
JPH0612605Y2 true JPH0612605Y2 (ja) 1994-03-30

Family

ID=30481665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985005293U Expired - Lifetime JPH0612605Y2 (ja) 1985-01-17 1985-01-17 イオン注入装置用エンドステ−シヨン

Country Status (1)

Country Link
JP (1) JPH0612605Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0748363B2 (ja) * 1987-10-05 1995-05-24 日新電機株式会社 イオン処理装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5792838A (en) * 1980-12-02 1982-06-09 Anelva Corp Cassette to cassette substrate process device
JPS58113256U (ja) * 1982-01-27 1983-08-02 日本電気ホームエレクトロニクス株式会社 半導体製造装置

Also Published As

Publication number Publication date
JPS61121654U (enrdf_load_stackoverflow) 1986-07-31

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