JPH0611509Y2 - マトリツクススイツチ回路 - Google Patents

マトリツクススイツチ回路

Info

Publication number
JPH0611509Y2
JPH0611509Y2 JP1986067325U JP6732586U JPH0611509Y2 JP H0611509 Y2 JPH0611509 Y2 JP H0611509Y2 JP 1986067325 U JP1986067325 U JP 1986067325U JP 6732586 U JP6732586 U JP 6732586U JP H0611509 Y2 JPH0611509 Y2 JP H0611509Y2
Authority
JP
Japan
Prior art keywords
current
voltage
matrix switch
column
row
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986067325U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62178379U (enrdf_load_stackoverflow
Inventor
勇 関根
正三 北
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Priority to JP1986067325U priority Critical patent/JPH0611509Y2/ja
Publication of JPS62178379U publication Critical patent/JPS62178379U/ja
Application granted granted Critical
Publication of JPH0611509Y2 publication Critical patent/JPH0611509Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Electronic Switches (AREA)
JP1986067325U 1986-05-02 1986-05-02 マトリツクススイツチ回路 Expired - Lifetime JPH0611509Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986067325U JPH0611509Y2 (ja) 1986-05-02 1986-05-02 マトリツクススイツチ回路

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986067325U JPH0611509Y2 (ja) 1986-05-02 1986-05-02 マトリツクススイツチ回路

Publications (2)

Publication Number Publication Date
JPS62178379U JPS62178379U (enrdf_load_stackoverflow) 1987-11-12
JPH0611509Y2 true JPH0611509Y2 (ja) 1994-03-23

Family

ID=30906133

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986067325U Expired - Lifetime JPH0611509Y2 (ja) 1986-05-02 1986-05-02 マトリツクススイツチ回路

Country Status (1)

Country Link
JP (1) JPH0611509Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018029971A1 (ja) * 2016-08-12 2018-02-15 東京エレクトロン株式会社 デバイス検査回路、デバイス検査装置及びプローブカード

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4511771B2 (ja) * 2001-08-10 2010-07-28 株式会社アドバンテスト 電圧印加電流測定装置及び半導体試験装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS593274A (ja) * 1982-06-29 1984-01-09 Nec Corp 集積回路試験装置の検査方法
JPS6094528A (ja) * 1983-10-28 1985-05-27 Nec Corp マトリクススイツチ拡張方式
JPS60172433U (ja) * 1984-04-24 1985-11-15 日本電気株式会社 マトリクススイツチ駆動回路

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018029971A1 (ja) * 2016-08-12 2018-02-15 東京エレクトロン株式会社 デバイス検査回路、デバイス検査装置及びプローブカード
JP2018025519A (ja) * 2016-08-12 2018-02-15 東京エレクトロン株式会社 デバイス検査回路、デバイス検査装置及びプローブカード

Also Published As

Publication number Publication date
JPS62178379U (enrdf_load_stackoverflow) 1987-11-12

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