JPH0610684Y2 - ボンディング装置 - Google Patents
ボンディング装置Info
- Publication number
- JPH0610684Y2 JPH0610684Y2 JP1989108668U JP10866889U JPH0610684Y2 JP H0610684 Y2 JPH0610684 Y2 JP H0610684Y2 JP 1989108668 U JP1989108668 U JP 1989108668U JP 10866889 U JP10866889 U JP 10866889U JP H0610684 Y2 JPH0610684 Y2 JP H0610684Y2
- Authority
- JP
- Japan
- Prior art keywords
- black
- bonding
- bonded
- component
- lead frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H10W70/682—
Landscapes
- Wire Bonding (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989108668U JPH0610684Y2 (ja) | 1989-09-19 | 1989-09-19 | ボンディング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989108668U JPH0610684Y2 (ja) | 1989-09-19 | 1989-09-19 | ボンディング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0348231U JPH0348231U (enExample) | 1991-05-08 |
| JPH0610684Y2 true JPH0610684Y2 (ja) | 1994-03-16 |
Family
ID=31657293
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989108668U Expired - Lifetime JPH0610684Y2 (ja) | 1989-09-19 | 1989-09-19 | ボンディング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0610684Y2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998001902A1 (en) * | 1996-07-08 | 1998-01-15 | Kabushiki Kaisha Toshiba | Semiconductor component fixing jig, table for placement of semiconductor component and bonding apparatus |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5754278U (enExample) * | 1980-09-18 | 1982-03-30 | ||
| JPS5790943A (en) * | 1980-11-26 | 1982-06-05 | Mitsubishi Electric Corp | Heating base for bonding of semiconductor element |
| JPS59174576A (ja) * | 1983-03-18 | 1984-10-03 | 日立化成工業株式会社 | SiC治具 |
| JPS61143686A (ja) * | 1984-12-18 | 1986-07-01 | イビデン株式会社 | 寸法精度の優れた耐熱性治具用炭化珪素質焼結体 |
| JP2664951B2 (ja) * | 1988-08-31 | 1997-10-22 | 山形日本電気株式会社 | 半導体製造装置 |
-
1989
- 1989-09-19 JP JP1989108668U patent/JPH0610684Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0348231U (enExample) | 1991-05-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8716864B2 (en) | Solderless die attach to a direct bonded aluminum substrate | |
| US5413964A (en) | Photo-definable template for semiconductor chip alignment | |
| US5549716A (en) | Process for manufacturing integrated circuits using an automated multi-station apparatus including an adhesive dispenser and apparatus therefor | |
| CN1685489A (zh) | 凸块形成方法、半导体器件及其制造方法、基板处理装置和半导体制造装置 | |
| CN1163954C (zh) | 半导体铜键合焊点表面保护 | |
| WO2000021346A1 (en) | Soldering of a semiconductor chip to a substrate | |
| TW200921820A (en) | Wire bonding system utilizing multiple positioning tables | |
| JPH04251945A (ja) | 微小箇所の電気接続方法及び該方法により形成された半導体装置 | |
| JPH0610684Y2 (ja) | ボンディング装置 | |
| JP3442615B2 (ja) | 基板加熱方法 | |
| EP0180091B1 (en) | Method of selectively depositing metal layers on a substrate | |
| US6336843B2 (en) | Electronic component chip feeder and manufacturing method of electronic devices using electronic component chips | |
| JP3747054B2 (ja) | ボンディング装置及びボンディング方法 | |
| US7037819B2 (en) | Method of making a circuitized substrate | |
| CN101866864A (zh) | 电子元件安装设备 | |
| CN1259705C (zh) | 祼芯片安装方法及安装系统 | |
| JPH0547771A (ja) | 電子回路部品 | |
| CN100397602C (zh) | 半导体铜键合焊点表面保护 | |
| CN1822340A (zh) | 半导体芯片封装设备和抛光处理半导体芯片封装的方法 | |
| US6227943B1 (en) | Method and system for pre-cleaning and post-cleaning deposited metal | |
| JPS63288091A (ja) | 回路基板 | |
| JPH0525235Y2 (enExample) | ||
| JPH09116251A (ja) | 半導体ベアチップの取付方法および取付構造 | |
| JPH02109339A (ja) | 電極付半導体チップ及びその実装方法 | |
| JPWO1998020541A1 (ja) | バンプの形成方法および半導体装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |