JPH0610611Y2 - 電子顕微鏡等の試料装置 - Google Patents

電子顕微鏡等の試料装置

Info

Publication number
JPH0610611Y2
JPH0610611Y2 JP1987003332U JP333287U JPH0610611Y2 JP H0610611 Y2 JPH0610611 Y2 JP H0610611Y2 JP 1987003332 U JP1987003332 U JP 1987003332U JP 333287 U JP333287 U JP 333287U JP H0610611 Y2 JPH0610611 Y2 JP H0610611Y2
Authority
JP
Japan
Prior art keywords
frame
holder
base
sample
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987003332U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63111747U (enExample
Inventor
秀雄 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP1987003332U priority Critical patent/JPH0610611Y2/ja
Publication of JPS63111747U publication Critical patent/JPS63111747U/ja
Application granted granted Critical
Publication of JPH0610611Y2 publication Critical patent/JPH0610611Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987003332U 1987-01-13 1987-01-13 電子顕微鏡等の試料装置 Expired - Lifetime JPH0610611Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987003332U JPH0610611Y2 (ja) 1987-01-13 1987-01-13 電子顕微鏡等の試料装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987003332U JPH0610611Y2 (ja) 1987-01-13 1987-01-13 電子顕微鏡等の試料装置

Publications (2)

Publication Number Publication Date
JPS63111747U JPS63111747U (enExample) 1988-07-18
JPH0610611Y2 true JPH0610611Y2 (ja) 1994-03-16

Family

ID=30782996

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987003332U Expired - Lifetime JPH0610611Y2 (ja) 1987-01-13 1987-01-13 電子顕微鏡等の試料装置

Country Status (1)

Country Link
JP (1) JPH0610611Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5240647B2 (ja) * 2007-07-30 2013-07-17 株式会社リコー シール機構、ステージ装置、及び電子線描画装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5141314B2 (enExample) * 1972-10-06 1976-11-09
JPS5962662U (ja) * 1982-10-20 1984-04-24 日本電子株式会社 電子線装置

Also Published As

Publication number Publication date
JPS63111747U (enExample) 1988-07-18

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