JPS63111747U - - Google Patents
Info
- Publication number
- JPS63111747U JPS63111747U JP333287U JP333287U JPS63111747U JP S63111747 U JPS63111747 U JP S63111747U JP 333287 U JP333287 U JP 333287U JP 333287 U JP333287 U JP 333287U JP S63111747 U JPS63111747 U JP S63111747U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- sample holder
- bellows
- lens barrel
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987003332U JPH0610611Y2 (ja) | 1987-01-13 | 1987-01-13 | 電子顕微鏡等の試料装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987003332U JPH0610611Y2 (ja) | 1987-01-13 | 1987-01-13 | 電子顕微鏡等の試料装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63111747U true JPS63111747U (enExample) | 1988-07-18 |
| JPH0610611Y2 JPH0610611Y2 (ja) | 1994-03-16 |
Family
ID=30782996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987003332U Expired - Lifetime JPH0610611Y2 (ja) | 1987-01-13 | 1987-01-13 | 電子顕微鏡等の試料装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0610611Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009033005A (ja) * | 2007-07-30 | 2009-02-12 | Ricoh Co Ltd | シール機構、ステージ装置、及び電子線描画装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4959567A (enExample) * | 1972-10-06 | 1974-06-10 | ||
| JPS5962662U (ja) * | 1982-10-20 | 1984-04-24 | 日本電子株式会社 | 電子線装置 |
-
1987
- 1987-01-13 JP JP1987003332U patent/JPH0610611Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4959567A (enExample) * | 1972-10-06 | 1974-06-10 | ||
| JPS5962662U (ja) * | 1982-10-20 | 1984-04-24 | 日本電子株式会社 | 電子線装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009033005A (ja) * | 2007-07-30 | 2009-02-12 | Ricoh Co Ltd | シール機構、ステージ装置、及び電子線描画装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0610611Y2 (ja) | 1994-03-16 |