JPH0610610Y2 - 電子顕微鏡 - Google Patents

電子顕微鏡

Info

Publication number
JPH0610610Y2
JPH0610610Y2 JP1987185126U JP18512687U JPH0610610Y2 JP H0610610 Y2 JPH0610610 Y2 JP H0610610Y2 JP 1987185126 U JP1987185126 U JP 1987185126U JP 18512687 U JP18512687 U JP 18512687U JP H0610610 Y2 JPH0610610 Y2 JP H0610610Y2
Authority
JP
Japan
Prior art keywords
dust
chamber
silica gel
voltage
exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987185126U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0189452U (enrdf_load_stackoverflow
Inventor
義弘 平田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP1987185126U priority Critical patent/JPH0610610Y2/ja
Publication of JPH0189452U publication Critical patent/JPH0189452U/ja
Application granted granted Critical
Publication of JPH0610610Y2 publication Critical patent/JPH0610610Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987185126U 1987-12-04 1987-12-04 電子顕微鏡 Expired - Lifetime JPH0610610Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987185126U JPH0610610Y2 (ja) 1987-12-04 1987-12-04 電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987185126U JPH0610610Y2 (ja) 1987-12-04 1987-12-04 電子顕微鏡

Publications (2)

Publication Number Publication Date
JPH0189452U JPH0189452U (enrdf_load_stackoverflow) 1989-06-13
JPH0610610Y2 true JPH0610610Y2 (ja) 1994-03-16

Family

ID=31476454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987185126U Expired - Lifetime JPH0610610Y2 (ja) 1987-12-04 1987-12-04 電子顕微鏡

Country Status (1)

Country Link
JP (1) JPH0610610Y2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5853829A (ja) * 1981-09-26 1983-03-30 Fujitsu Ltd 電子ビ−ム露光装置
JPS611485A (ja) * 1984-06-13 1986-01-07 Mitsubishi Electric Corp 電子ビ−ム溶接装置

Also Published As

Publication number Publication date
JPH0189452U (enrdf_load_stackoverflow) 1989-06-13

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