JPH0189452U - - Google Patents

Info

Publication number
JPH0189452U
JPH0189452U JP18512687U JP18512687U JPH0189452U JP H0189452 U JPH0189452 U JP H0189452U JP 18512687 U JP18512687 U JP 18512687U JP 18512687 U JP18512687 U JP 18512687U JP H0189452 U JPH0189452 U JP H0189452U
Authority
JP
Japan
Prior art keywords
evacuated chamber
dust suction
high voltage
evacuating
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18512687U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0610610Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987185126U priority Critical patent/JPH0610610Y2/ja
Publication of JPH0189452U publication Critical patent/JPH0189452U/ja
Application granted granted Critical
Publication of JPH0610610Y2 publication Critical patent/JPH0610610Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987185126U 1987-12-04 1987-12-04 電子顕微鏡 Expired - Lifetime JPH0610610Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987185126U JPH0610610Y2 (ja) 1987-12-04 1987-12-04 電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987185126U JPH0610610Y2 (ja) 1987-12-04 1987-12-04 電子顕微鏡

Publications (2)

Publication Number Publication Date
JPH0189452U true JPH0189452U (enrdf_load_stackoverflow) 1989-06-13
JPH0610610Y2 JPH0610610Y2 (ja) 1994-03-16

Family

ID=31476454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987185126U Expired - Lifetime JPH0610610Y2 (ja) 1987-12-04 1987-12-04 電子顕微鏡

Country Status (1)

Country Link
JP (1) JPH0610610Y2 (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5853829A (ja) * 1981-09-26 1983-03-30 Fujitsu Ltd 電子ビ−ム露光装置
JPS611485A (ja) * 1984-06-13 1986-01-07 Mitsubishi Electric Corp 電子ビ−ム溶接装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5853829A (ja) * 1981-09-26 1983-03-30 Fujitsu Ltd 電子ビ−ム露光装置
JPS611485A (ja) * 1984-06-13 1986-01-07 Mitsubishi Electric Corp 電子ビ−ム溶接装置

Also Published As

Publication number Publication date
JPH0610610Y2 (ja) 1994-03-16

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