JPH03116558U - - Google Patents

Info

Publication number
JPH03116558U
JPH03116558U JP2338590U JP2338590U JPH03116558U JP H03116558 U JPH03116558 U JP H03116558U JP 2338590 U JP2338590 U JP 2338590U JP 2338590 U JP2338590 U JP 2338590U JP H03116558 U JPH03116558 U JP H03116558U
Authority
JP
Japan
Prior art keywords
particle beam
generation chamber
beam generation
outer cylinder
exhaust means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2338590U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0727552Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990023385U priority Critical patent/JPH0727552Y2/ja
Publication of JPH03116558U publication Critical patent/JPH03116558U/ja
Application granted granted Critical
Publication of JPH0727552Y2 publication Critical patent/JPH0727552Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1990023385U 1990-03-08 1990-03-08 荷電粒子線発生装置 Expired - Lifetime JPH0727552Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990023385U JPH0727552Y2 (ja) 1990-03-08 1990-03-08 荷電粒子線発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990023385U JPH0727552Y2 (ja) 1990-03-08 1990-03-08 荷電粒子線発生装置

Publications (2)

Publication Number Publication Date
JPH03116558U true JPH03116558U (enrdf_load_stackoverflow) 1991-12-03
JPH0727552Y2 JPH0727552Y2 (ja) 1995-06-21

Family

ID=31526372

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990023385U Expired - Lifetime JPH0727552Y2 (ja) 1990-03-08 1990-03-08 荷電粒子線発生装置

Country Status (1)

Country Link
JP (1) JPH0727552Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008289623A (ja) * 2007-05-23 2008-12-04 Ban Seisakusho:Kk 家庭用岩盤浴装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63318046A (ja) * 1987-06-19 1988-12-26 Jeol Ltd 電子線発生装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63318046A (ja) * 1987-06-19 1988-12-26 Jeol Ltd 電子線発生装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008289623A (ja) * 2007-05-23 2008-12-04 Ban Seisakusho:Kk 家庭用岩盤浴装置

Also Published As

Publication number Publication date
JPH0727552Y2 (ja) 1995-06-21

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