JPH0727552Y2 - 荷電粒子線発生装置 - Google Patents

荷電粒子線発生装置

Info

Publication number
JPH0727552Y2
JPH0727552Y2 JP1990023385U JP2338590U JPH0727552Y2 JP H0727552 Y2 JPH0727552 Y2 JP H0727552Y2 JP 1990023385 U JP1990023385 U JP 1990023385U JP 2338590 U JP2338590 U JP 2338590U JP H0727552 Y2 JPH0727552 Y2 JP H0727552Y2
Authority
JP
Japan
Prior art keywords
particle beam
charged particle
outer cylinder
chamber
electron gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990023385U
Other languages
English (en)
Japanese (ja)
Other versions
JPH03116558U (enrdf_load_stackoverflow
Inventor
健 富田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP1990023385U priority Critical patent/JPH0727552Y2/ja
Publication of JPH03116558U publication Critical patent/JPH03116558U/ja
Application granted granted Critical
Publication of JPH0727552Y2 publication Critical patent/JPH0727552Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1990023385U 1990-03-08 1990-03-08 荷電粒子線発生装置 Expired - Lifetime JPH0727552Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990023385U JPH0727552Y2 (ja) 1990-03-08 1990-03-08 荷電粒子線発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990023385U JPH0727552Y2 (ja) 1990-03-08 1990-03-08 荷電粒子線発生装置

Publications (2)

Publication Number Publication Date
JPH03116558U JPH03116558U (enrdf_load_stackoverflow) 1991-12-03
JPH0727552Y2 true JPH0727552Y2 (ja) 1995-06-21

Family

ID=31526372

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990023385U Expired - Lifetime JPH0727552Y2 (ja) 1990-03-08 1990-03-08 荷電粒子線発生装置

Country Status (1)

Country Link
JP (1) JPH0727552Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008289623A (ja) * 2007-05-23 2008-12-04 Ban Seisakusho:Kk 家庭用岩盤浴装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63318046A (ja) * 1987-06-19 1988-12-26 Jeol Ltd 電子線発生装置

Also Published As

Publication number Publication date
JPH03116558U (enrdf_load_stackoverflow) 1991-12-03

Similar Documents

Publication Publication Date Title
US2882116A (en) Method of making electron tubes
US6456005B1 (en) Materials and methods for application of conducting members on arc tubes
US6422824B1 (en) Getting assembly for vacuum display panels
JPH0727552Y2 (ja) 荷電粒子線発生装置
JP3533916B2 (ja) イオンビーム照射装置
JP2003065490A (ja) 真空断熱体の製造方法
CN107633989B (zh) 一种提高冷阴极封装器件高压工作稳定性的排气方法
US4295072A (en) Field emission electron gun with anode heater and plural exhausts
KR100318724B1 (ko) 음극선관의제조방법및그장치
JPS61291965A (ja) 超高真空チヤンバ−
US1943523A (en) Electron tube
US3535011A (en) Method of making photoemissive electron tubes
JPH0982227A (ja) Ｘ線管の排気方法及び排気装置
US2730280A (en) Machines for evacuating electron discharge devices and the like
JPS5833009B2 (ja) 真空槽ガス出し装置
JP3100528B2 (ja) 断熱容器のベーキング方法
JPS63221622A (ja) 乾式薄膜加工装置
JPS62193099A (ja) 真空チヤンバ
KR100465733B1 (ko) Fed제조 공정중 진공 페키징 방법 및 그에 따른 패널 구조
JPS63318046A (ja) 電子線発生装置
JPH0618105B2 (ja) 陰極線管の製造装置
JPH0520854B2 (enrdf_load_stackoverflow)
JPH04210198A (ja) 真空断熱容器
JPH0317255A (ja) 物質蒸気発生装置
CN113737198A (zh) 气密封接闸流管内空心电极表面的清洗方法