JPS6215758U - - Google Patents

Info

Publication number
JPS6215758U
JPS6215758U JP10679585U JP10679585U JPS6215758U JP S6215758 U JPS6215758 U JP S6215758U JP 10679585 U JP10679585 U JP 10679585U JP 10679585 U JP10679585 U JP 10679585U JP S6215758 U JPS6215758 U JP S6215758U
Authority
JP
Japan
Prior art keywords
hollow
hollow part
plasma
gas
cathode discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10679585U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0145067Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10679585U priority Critical patent/JPH0145067Y2/ja
Publication of JPS6215758U publication Critical patent/JPS6215758U/ja
Application granted granted Critical
Publication of JPH0145067Y2 publication Critical patent/JPH0145067Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP10679585U 1985-07-12 1985-07-12 Expired JPH0145067Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10679585U JPH0145067Y2 (enrdf_load_stackoverflow) 1985-07-12 1985-07-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10679585U JPH0145067Y2 (enrdf_load_stackoverflow) 1985-07-12 1985-07-12

Publications (2)

Publication Number Publication Date
JPS6215758U true JPS6215758U (enrdf_load_stackoverflow) 1987-01-30
JPH0145067Y2 JPH0145067Y2 (enrdf_load_stackoverflow) 1989-12-26

Family

ID=30982484

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10679585U Expired JPH0145067Y2 (enrdf_load_stackoverflow) 1985-07-12 1985-07-12

Country Status (1)

Country Link
JP (1) JPH0145067Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007095536A (ja) * 2005-09-29 2007-04-12 Univ Nagoya ラジカル発生装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007095536A (ja) * 2005-09-29 2007-04-12 Univ Nagoya ラジカル発生装置

Also Published As

Publication number Publication date
JPH0145067Y2 (enrdf_load_stackoverflow) 1989-12-26

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