JPH0145067Y2 - - Google Patents
Info
- Publication number
- JPH0145067Y2 JPH0145067Y2 JP10679585U JP10679585U JPH0145067Y2 JP H0145067 Y2 JPH0145067 Y2 JP H0145067Y2 JP 10679585 U JP10679585 U JP 10679585U JP 10679585 U JP10679585 U JP 10679585U JP H0145067 Y2 JPH0145067 Y2 JP H0145067Y2
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- electrode
- hcd
- flow rate
- hollow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 150000002500 ions Chemical class 0.000 description 7
- 238000000605 extraction Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000007664 blowing Methods 0.000 description 4
- 230000001133 acceleration Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000036470 plasma concentration Effects 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10679585U JPH0145067Y2 (enrdf_load_stackoverflow) | 1985-07-12 | 1985-07-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10679585U JPH0145067Y2 (enrdf_load_stackoverflow) | 1985-07-12 | 1985-07-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6215758U JPS6215758U (enrdf_load_stackoverflow) | 1987-01-30 |
| JPH0145067Y2 true JPH0145067Y2 (enrdf_load_stackoverflow) | 1989-12-26 |
Family
ID=30982484
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10679585U Expired JPH0145067Y2 (enrdf_load_stackoverflow) | 1985-07-12 | 1985-07-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0145067Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4784977B2 (ja) * | 2005-09-29 | 2011-10-05 | 国立大学法人名古屋大学 | ラジカル発生装置 |
-
1985
- 1985-07-12 JP JP10679585U patent/JPH0145067Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6215758U (enrdf_load_stackoverflow) | 1987-01-30 |
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