JPH0485644U - - Google Patents

Info

Publication number
JPH0485644U
JPH0485644U JP12894690U JP12894690U JPH0485644U JP H0485644 U JPH0485644 U JP H0485644U JP 12894690 U JP12894690 U JP 12894690U JP 12894690 U JP12894690 U JP 12894690U JP H0485644 U JPH0485644 U JP H0485644U
Authority
JP
Japan
Prior art keywords
charged particle
partial pressure
measuring
utility
scope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12894690U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12894690U priority Critical patent/JPH0485644U/ja
Publication of JPH0485644U publication Critical patent/JPH0485644U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP12894690U 1990-11-30 1990-11-30 Pending JPH0485644U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12894690U JPH0485644U (enrdf_load_stackoverflow) 1990-11-30 1990-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12894690U JPH0485644U (enrdf_load_stackoverflow) 1990-11-30 1990-11-30

Publications (1)

Publication Number Publication Date
JPH0485644U true JPH0485644U (enrdf_load_stackoverflow) 1992-07-24

Family

ID=31876380

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12894690U Pending JPH0485644U (enrdf_load_stackoverflow) 1990-11-30 1990-11-30

Country Status (1)

Country Link
JP (1) JPH0485644U (enrdf_load_stackoverflow)

Similar Documents

Publication Publication Date Title
JPH0485644U (enrdf_load_stackoverflow)
JPS6448863U (enrdf_load_stackoverflow)
JPS6120561U (ja) 真空成膜装置
JPH0411460U (enrdf_load_stackoverflow)
JPH0186056U (enrdf_load_stackoverflow)
JPS62200244U (enrdf_load_stackoverflow)
JPH0323932U (enrdf_load_stackoverflow)
JPH03116553U (enrdf_load_stackoverflow)
JPS6371562U (enrdf_load_stackoverflow)
JPS61167934U (enrdf_load_stackoverflow)
JPS63109299U (enrdf_load_stackoverflow)
JPH0364463U (enrdf_load_stackoverflow)
JPS6387760U (enrdf_load_stackoverflow)
JPS61165747U (enrdf_load_stackoverflow)
JPS6269364U (enrdf_load_stackoverflow)
JPS62188138U (enrdf_load_stackoverflow)
JPH02114927U (enrdf_load_stackoverflow)
JPH0246857U (enrdf_load_stackoverflow)
JPH0183254U (enrdf_load_stackoverflow)
JPH0436759U (enrdf_load_stackoverflow)
JPH0165132U (enrdf_load_stackoverflow)
JPS61131657U (enrdf_load_stackoverflow)
JPH0214359U (enrdf_load_stackoverflow)
JPS6166918U (enrdf_load_stackoverflow)
JPH01167393U (enrdf_load_stackoverflow)