JPS62200244U - - Google Patents

Info

Publication number
JPS62200244U
JPS62200244U JP8786986U JP8786986U JPS62200244U JP S62200244 U JPS62200244 U JP S62200244U JP 8786986 U JP8786986 U JP 8786986U JP 8786986 U JP8786986 U JP 8786986U JP S62200244 U JPS62200244 U JP S62200244U
Authority
JP
Japan
Prior art keywords
implantation
cleaning
implantation chamber
vacuum
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8786986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8786986U priority Critical patent/JPS62200244U/ja
Publication of JPS62200244U publication Critical patent/JPS62200244U/ja
Pending legal-status Critical Current

Links

JP8786986U 1986-06-11 1986-06-11 Pending JPS62200244U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8786986U JPS62200244U (enrdf_load_stackoverflow) 1986-06-11 1986-06-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8786986U JPS62200244U (enrdf_load_stackoverflow) 1986-06-11 1986-06-11

Publications (1)

Publication Number Publication Date
JPS62200244U true JPS62200244U (enrdf_load_stackoverflow) 1987-12-19

Family

ID=30945473

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8786986U Pending JPS62200244U (enrdf_load_stackoverflow) 1986-06-11 1986-06-11

Country Status (1)

Country Link
JP (1) JPS62200244U (enrdf_load_stackoverflow)

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