JPH0183254U - - Google Patents

Info

Publication number
JPH0183254U
JPH0183254U JP1987178327U JP17832787U JPH0183254U JP H0183254 U JPH0183254 U JP H0183254U JP 1987178327 U JP1987178327 U JP 1987178327U JP 17832787 U JP17832787 U JP 17832787U JP H0183254 U JPH0183254 U JP H0183254U
Authority
JP
Japan
Prior art keywords
shutter
introduction shaft
particle beam
shaft
cushion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987178327U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987178327U priority Critical patent/JPH0183254U/ja
Publication of JPH0183254U publication Critical patent/JPH0183254U/ja
Pending legal-status Critical Current

Links

JP1987178327U 1987-11-25 1987-11-25 Pending JPH0183254U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987178327U JPH0183254U (enrdf_load_stackoverflow) 1987-11-25 1987-11-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987178327U JPH0183254U (enrdf_load_stackoverflow) 1987-11-25 1987-11-25

Publications (1)

Publication Number Publication Date
JPH0183254U true JPH0183254U (enrdf_load_stackoverflow) 1989-06-02

Family

ID=31469950

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987178327U Pending JPH0183254U (enrdf_load_stackoverflow) 1987-11-25 1987-11-25

Country Status (1)

Country Link
JP (1) JPH0183254U (enrdf_load_stackoverflow)

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