JPS6444555U - - Google Patents

Info

Publication number
JPS6444555U
JPS6444555U JP13954087U JP13954087U JPS6444555U JP S6444555 U JPS6444555 U JP S6444555U JP 13954087 U JP13954087 U JP 13954087U JP 13954087 U JP13954087 U JP 13954087U JP S6444555 U JPS6444555 U JP S6444555U
Authority
JP
Japan
Prior art keywords
vacuum chamber
mounting member
sample mounting
joint
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13954087U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0628776Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987139540U priority Critical patent/JPH0628776Y2/ja
Publication of JPS6444555U publication Critical patent/JPS6444555U/ja
Application granted granted Critical
Publication of JPH0628776Y2 publication Critical patent/JPH0628776Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP1987139540U 1987-09-11 1987-09-11 試料ステージ Expired - Lifetime JPH0628776Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987139540U JPH0628776Y2 (ja) 1987-09-11 1987-09-11 試料ステージ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987139540U JPH0628776Y2 (ja) 1987-09-11 1987-09-11 試料ステージ

Publications (2)

Publication Number Publication Date
JPS6444555U true JPS6444555U (enrdf_load_stackoverflow) 1989-03-16
JPH0628776Y2 JPH0628776Y2 (ja) 1994-08-03

Family

ID=31402892

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987139540U Expired - Lifetime JPH0628776Y2 (ja) 1987-09-11 1987-09-11 試料ステージ

Country Status (1)

Country Link
JP (1) JPH0628776Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9159527B2 (en) 2003-10-16 2015-10-13 Carl Zeiss Microscopy, Llc Systems and methods for a gas field ionization source

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60227347A (ja) * 1984-04-25 1985-11-12 Hitachi Ltd 走査形電子顕微鏡
JPS6119042A (ja) * 1984-07-04 1986-01-27 Hitachi Ltd 荷電粒子線装置の試料室

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60227347A (ja) * 1984-04-25 1985-11-12 Hitachi Ltd 走査形電子顕微鏡
JPS6119042A (ja) * 1984-07-04 1986-01-27 Hitachi Ltd 荷電粒子線装置の試料室

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9159527B2 (en) 2003-10-16 2015-10-13 Carl Zeiss Microscopy, Llc Systems and methods for a gas field ionization source

Also Published As

Publication number Publication date
JPH0628776Y2 (ja) 1994-08-03

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