JPS6444555U - - Google Patents

Info

Publication number
JPS6444555U
JPS6444555U JP13954087U JP13954087U JPS6444555U JP S6444555 U JPS6444555 U JP S6444555U JP 13954087 U JP13954087 U JP 13954087U JP 13954087 U JP13954087 U JP 13954087U JP S6444555 U JPS6444555 U JP S6444555U
Authority
JP
Japan
Prior art keywords
vacuum chamber
mounting member
sample mounting
joint
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13954087U
Other languages
Japanese (ja)
Other versions
JPH0628776Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987139540U priority Critical patent/JPH0628776Y2/en
Publication of JPS6444555U publication Critical patent/JPS6444555U/ja
Application granted granted Critical
Publication of JPH0628776Y2 publication Critical patent/JPH0628776Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

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  • Analysing Materials By The Use Of Radiation (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例の断面図、第２図は
従来例の断面図である。 １……真空チヤンバ、６……試料プレート、３
……ベローズ、１０……移動機構。 FIG. 1 is a sectional view of an embodiment of the present invention, and FIG. 2 is a sectional view of a conventional example. 1... Vacuum chamber, 6... Sample plate, 3
...Bellows, 10...Movement mechanism.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 真空チヤンバの壁の一部に形成された開口部か
ら前記真空チヤンバ内に向かつて気密保持用の伸
縮自在の継ぎ手を突出させ、この継ぎ手の前記突
出した端部に試料載置用の部材が、前記真空チヤ
ンバの内側と外側とを隔離するように気密に固定
され、前記継ぎ手および試料載置用の部材により
隔離された真空チヤンバの外側の空間、前記試料
載置用の部材を支持移動させる移動機構が前記試
料載置用の部材に近接配置されることを特徴とす
る試料ステージ。 A telescoping joint for airtight maintenance projects into the vacuum chamber from an opening formed in a part of the wall of the vacuum chamber, and a sample mounting member is provided at the projecting end of the joint. A space outside the vacuum chamber that is airtightly fixed so as to isolate the inside and outside of the vacuum chamber and separated by the joint and the sample mounting member, and movement that supports and moves the sample mounting member. A sample stage characterized in that a mechanism is arranged close to the sample mounting member.
JP1987139540U 1987-09-11 1987-09-11 Sample stage Expired - Lifetime JPH0628776Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987139540U JPH0628776Y2 (en) 1987-09-11 1987-09-11 Sample stage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987139540U JPH0628776Y2 (en) 1987-09-11 1987-09-11 Sample stage

Publications (2)

Publication Number Publication Date
JPS6444555U true JPS6444555U (en) 1989-03-16
JPH0628776Y2 JPH0628776Y2 (en) 1994-08-03

Family

ID=31402892

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987139540U Expired - Lifetime JPH0628776Y2 (en) 1987-09-11 1987-09-11 Sample stage

Country Status (1)

Country Link
JP (1) JPH0628776Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9159527B2 (en) 2003-10-16 2015-10-13 Carl Zeiss Microscopy, Llc Systems and methods for a gas field ionization source

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60227347A (en) * 1984-04-25 1985-11-12 Hitachi Ltd Scanning type electron microscope
JPS6119042A (en) * 1984-07-04 1986-01-27 Hitachi Ltd Sample chamber for charged particle ray device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60227347A (en) * 1984-04-25 1985-11-12 Hitachi Ltd Scanning type electron microscope
JPS6119042A (en) * 1984-07-04 1986-01-27 Hitachi Ltd Sample chamber for charged particle ray device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9159527B2 (en) 2003-10-16 2015-10-13 Carl Zeiss Microscopy, Llc Systems and methods for a gas field ionization source

Also Published As

Publication number Publication date
JPH0628776Y2 (en) 1994-08-03

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