JPH0628776Y2 - Sample stage - Google Patents
Sample stageInfo
- Publication number
- JPH0628776Y2 JPH0628776Y2 JP1987139540U JP13954087U JPH0628776Y2 JP H0628776 Y2 JPH0628776 Y2 JP H0628776Y2 JP 1987139540 U JP1987139540 U JP 1987139540U JP 13954087 U JP13954087 U JP 13954087U JP H0628776 Y2 JPH0628776 Y2 JP H0628776Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- vacuum chamber
- mounting member
- moving mechanism
- joint
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Description
【考案の詳細な説明】 （イ）産業上の利用分野 本考案は、例えば、ＥＳＣＡやＳＩＭＳのような表面分
析装置などに好適な試料ステージに関する。DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application The present invention relates to a sample stage suitable for a surface analyzer such as ESCA or SIMS.
一般にこの種の表面分析装置では、真空チャンバ（分析
室）の内部が１０-8torr〜１０-11torr程度の超高真空
に保持され、この中で試料ステージにより試料を移動さ
せて分析を行っている。Generally, in this type of surface analyzer, the inside of a vacuum chamber (analysis chamber) is maintained in an ultrahigh vacuum of about 10 -8 torr to 10 -11 torr, and the sample is moved by a sample stage in this to perform analysis. ing.
従来、このような超高真空用の試料ステージとして、例
えば、第２図に示されるマニピュレータ方式ものがあ
る。この第２図において、１７は高真空に保持される真
空チャンバ、１８は取り付けフランジ、１９は気密保持
用のベローズ、２０は銅ガスケット、２１は試料、２２
は試料ブロック、２３は前記試料２１を軸２４を介して
移動させるための移動機構であり、図の左右方向に移動
させるための第１，第２可動部２５，２６と、前後方向
に移動させるための第３，第４可動部２７，２８と、上
下方向に移動させるための第５，第６可動部２９，３０
とから構成されている。Conventionally, as such a sample stage for ultra-high vacuum, for example, there is a manipulator system shown in FIG. In FIG. 2, 17 is a vacuum chamber that is maintained in a high vacuum, 18 is a mounting flange, 19 is a bellows for maintaining airtightness, 20 is a copper gasket, 21 is a sample, 22
Is a sample block, and 23 is a moving mechanism for moving the sample 21 via a shaft 24, and first and second movable parts 25, 26 for moving the sample 21 in the left-right direction, and for moving it in the front-back direction. Third and fourth movable parts 27, 28 for moving the fifth and sixth movable parts 29, 30 for moving vertically.
It consists of and.
このような従来の試料ステージでは、ベローズ１９およ
び移動機構２３は、真空チャンバ１７の外側に配置され
ており、軸２４を介して試料２１を移動させているため
に、軸２４が長く、また、一端で支持されているため
に、外部の振動の影響を受けて試料２１が振動し易いと
いう難点がある。In such a conventional sample stage, since the bellows 19 and the moving mechanism 23 are arranged outside the vacuum chamber 17 and the sample 21 is moved via the shaft 24, the shaft 24 is long, and Since it is supported at one end, there is a drawback that the sample 21 is likely to vibrate under the influence of external vibration.
本考案は、上述の点に鑑みて為されたものであって、振
動が少ない高精度の試料ステージを提供することを目的
とする。The present invention has been made in view of the above points, and an object thereof is to provide a high-precision sample stage with less vibration.
（ハ）問題点を解決するための手段 本考案の試料ステージでは、真空チャンバの壁の一部に
形成された開口部から前記真空チャンバ内方に向かって
気密保持用の伸縮自在の継ぎ手を突出させ、この継ぎ手
の前記突出した端部に試料載置用の部材が、前記真空チ
ャンバの内側と外側とを隔離するように気密に固定さ
れ、前記継ぎ手および試料載置用の部材により隔離され
た真空チャンバの外側の空間に、前記試料載置用の部材
を支持移動させる移動機構が前記試料載置用の部材に近
接配置され、前記移動機構は、前記試料載置用部材を、
前記真空チャンバ内方に向かう方向に沿って移動させる
とともに、当該方向に対して垂直な方向にも移動させる
ように構成している。(C) Means for Solving the Problems In the sample stage of the present invention, an expandable joint for airtightness is projected from the opening formed in a part of the wall of the vacuum chamber toward the inside of the vacuum chamber. Then, a member for mounting a sample was hermetically fixed to the projecting end of the joint so as to separate the inside and the outside of the vacuum chamber, and was separated by the member for mounting the joint and the sample. In the space outside the vacuum chamber, a moving mechanism that supports and moves the member for mounting the sample is disposed in proximity to the member for mounting the sample, and the moving mechanism includes the member for mounting the sample,
It is configured to move along the direction toward the inside of the vacuum chamber and also to move in a direction perpendicular to the direction.
（ニ）作用 上記構成によれば、伸縮自在の継ぎ手を真空チャンバ内
に突出するように配置し、その突出した端部に試料載置
用の部材を設けているので、この試料載置用の部材を支
持移動させる移動機構を、前記試料載置用の部材に近接
配置でき、試料載置用の部材を安定に支持あるいは移動
させることができるとともに、その移動の際の振動の除
去に有効である。(D) Operation According to the above configuration, since the expandable joint is arranged so as to project into the vacuum chamber, and the sample mounting member is provided at the projecting end, A moving mechanism for supporting and moving the member can be disposed in the vicinity of the sample mounting member, can stably support or move the sample mounting member, and is effective in removing vibration during the movement. is there.
（ホ）実施例 以下、図面によって本考案の実施例について詳細に説明
する。第１図は本考案の一実施例の試料ステージの断面
図である。同図において、１は高真空に保持される真空
チャンバであり、この真空チャンバ１の底壁１ａの一部
には、開口部が形成されており、この開口部には、取り
付けフランジ２によって気密保持用の伸縮自在の継ぎ手
であるベローズ３の一端が取り付けられている。そし
て、このベローズ３は真空チャンバ１の内方に突出する
ように設けられている。真空チャンバ１の底壁１ａと取
り付けフランジ２との間には、気密性保持のために銅ガ
スケット４が介装されている。(E) Embodiment Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. FIG. 1 is a sectional view of a sample stage according to an embodiment of the present invention. In the figure, 1 is a vacuum chamber that is maintained in a high vacuum, and an opening is formed in a part of the bottom wall 1 a of this vacuum chamber 1, and this opening is airtight by a mounting flange 2. One end of a bellows 3, which is a stretchable joint for holding, is attached. The bellows 3 is provided so as to project inward of the vacuum chamber 1. A copper gasket 4 is interposed between the bottom wall 1 a of the vacuum chamber 1 and the mounting flange 2 to maintain airtightness.
真空チャンバ１の内方に突出したベローズ３の他方の端
部は、取り付けフランジ５によって試料載置用の部材で
ある試料プレート６に気密に取り付けられる。この試料
プート６には、試料８および試料ブロック９が載置され
る。７は気密性保持のための銅ガスケットである。取り
付けフランジ２，５、ベローズ３および試料プレート６
によって真空チャンバ１の内側と外側とが気密に隔離さ
れるようになっている。The other end of the bellows 3 protruding inward of the vacuum chamber 1 is airtightly attached to a sample plate 6 which is a member for mounting a sample by a mounting flange 5. A sample 8 and a sample block 9 are placed on this sample putt 6. 7 is a copper gasket for maintaining airtightness. Mounting flanges 2, 5, bellows 3 and sample plate 6
The inside and the outside of the vacuum chamber 1 are airtightly separated by.
ベローズ３および試料プレート６等によって隔離された
真空チャンバ１の外側の空間には、試料プレート６を支
持し、このプレート６を図の左右方向（Ｘ軸方向）、前
後方向（Ｙ軸方向）および真空チャンバ１内方に向かう
方向に沿う方向、すなわち、上下方向（Ｚ軸方向）の３
軸方向に移動させる移動機構１０が配置されている。A sample plate 6 is supported in a space outside the vacuum chamber 1 which is isolated by the bellows 3 and the sample plate 6, and the plate 6 is supported in the left-right direction (X axis direction), the front-back direction (Y axis direction), and The direction along the direction toward the inside of the vacuum chamber 1, that is, the vertical direction (Z-axis direction) 3
A moving mechanism 10 for moving in the axial direction is arranged.
この移動機構１０は、上下方向（Ｚ軸方向）に移動させ
るための第１，第２可動部１１，１２と、前後方向（Ｙ
軸方向）に移動させるための第３，第４可動部１３，１
４と、左右方向（Ｘ軸方向）に移動させるための第５，
第６可動部１５，１６とから構成されている。The moving mechanism 10 includes first and second movable portions 11 and 12 for moving in the up-down direction (Z-axis direction) and a front-back direction (Y.
Third and fourth movable parts 13, 1 for moving in the axial direction)
4 and the fifth and fifth for moving in the left-right direction (X-axis direction)
It is composed of sixth movable parts 15 and 16.
すなわち、第５可動部１５が第６可動部１６に沿って左
右方向に移動することにより、第５可動部１５上の各部
が左右方向に移動し、また、第４可動部１４が第３可動
部１３に沿って前後方向に移動することにより、第４可
動部１４上の各部が前後方向に移動し、さらに、第１可
動部１１が第２可動部１２に沿って上下方向に移動する
ことにより、第１可動部１１と一体的な試料プレート６
が上下方向に移動する。したがって、試料プレート６上
の試料８は、移動機構１０により左右方向、前後方向お
よび上下方向に移動する。That is, when the fifth movable portion 15 moves in the left-right direction along the sixth movable portion 16, each part on the fifth movable portion 15 moves in the left-right direction, and the fourth movable portion 14 moves in the third movable direction. By moving in the front-back direction along the portion 13, each part on the fourth movable portion 14 moves in the front-back direction, and further, the first movable portion 11 moves in the vertical direction along the second movable portion 12. Allows the sample plate 6 integrated with the first movable portion 11 to be
Moves up and down. Therefore, the sample 8 on the sample plate 6 is moved by the moving mechanism 10 in the left-right direction, the front-back direction, and the up-down direction.
この移動機構１０は、例えば、ラックとピニオンとを利
用して構成されており、図示しない駆動手段によって駆
動される。この移動機構１０は、フランジ３１により支
持されている。The moving mechanism 10 is configured using, for example, a rack and a pinion, and is driven by a driving unit (not shown). The moving mechanism 10 is supported by a flange 31.
このようにベローズ３を真空チャンバ１内に突設させ、
移動機構１０を試料プレート６に近接して配置している
ので、第２図の従来例に比べて振動に対して安定であ
り、また、移動機構１０は真空チャンバ１の外側にある
ために真空チャンバ１内へのガスの放出が少なくなり、
高精度の試料ステージとなる。In this way, the bellows 3 is projected in the vacuum chamber 1,
Since the moving mechanism 10 is arranged close to the sample plate 6, it is more stable against vibration than the conventional example shown in FIG. 2, and since the moving mechanism 10 is outside the vacuum chamber 1, it is vacuum. Less gas is released into chamber 1,
It becomes a highly accurate sample stage.
上述の実施例では、試料ステージは、真空チャンバの下
側に設置したけれども、下側でなくてもよいのは勿論で
あり、また、上述の実施例では、Ｘ，Ｙ，Ｚの３軸方向
の移動機構１０であったけれども、さらに、試料プレー
ト６を傾斜させる機構を付加してもよい。Although the sample stage is installed on the lower side of the vacuum chamber in the above-described embodiment, it is needless to say that the sample stage is not on the lower side, and in the above-described embodiment, the three-axis directions of X, Y, and Z are provided. However, a mechanism for inclining the sample plate 6 may be added.
（ヘ）効果 以上のように本考案によれば、真空チャンバの壁の一部
に形成された開口部から前記真空チャンバ内に向かって
気密保持用の伸縮自在の継ぎ手を突出させ、この継ぎ手
の前記突出した端部に試料載置用の部材が、前記真空チ
ャンバの内側と外側とを隔離するように気密に固定さ
れ、前記継ぎ手および試料載置用の部材により隔離され
た真空チャンバの外側の空間に、前記試料載置用の部材
を支持移動させる移動機構が前記試料載置用の部材に近
接配置されるので、試料載置用の部材が移動機構によっ
て安定に支持あるいは移動されることになり、試料載置
用部材を移動させる際の振動を含む外部の振動に対して
安定な高精度の試料ステージとなる。(F) Effect As described above, according to the present invention, the expandable joint for airtightness is projected from the opening formed in a part of the wall of the vacuum chamber into the vacuum chamber, and the joint is A sample mounting member is hermetically fixed to the projecting end so as to isolate the inside and the outside of the vacuum chamber, and the outside of the vacuum chamber separated by the joint and the sample mounting member. Since the moving mechanism for supporting and moving the sample mounting member is disposed in the space in the vicinity of the sample mounting member, the sample mounting member is stably supported or moved by the moving mechanism. Therefore, the sample stage becomes a highly accurate sample stage that is stable against external vibration including vibration when the sample mounting member is moved.
【図面の簡単な説明】 第１図は本考案の一実施例の断面図、第２図は従来例の
断面図である。 １……真空チャンバ、６……試料プレート、３……ベロ
ーズ、１０……移動機構。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a sectional view of an embodiment of the present invention, and FIG. 2 is a sectional view of a conventional example. 1 ... vacuum chamber, 6 ... sample plate, 3 ... bellows, 10 ... moving mechanism.
Claims (1)
部から前記真空チャンバ内方に向かって気密保持用の伸
縮自在の継ぎ手を突出させ、 この継ぎ手の前記突出した端部に試料載置用の部材が、
前記真空チャンバの内側と外側とを隔離するように気密
に固定され、 前記継ぎ手および試料載置用の部材により隔離された真
空チャンバの外側の空間に、前記試料載置用の部材を支
持移動させる移動機構が前記試料載置用の部材に近接配
置され、 前記移動機構は、前記試料載置用部材を、前記真空チャ
ンバ内方に向かう方向に沿って移動させるとともに、当
該方向に対して垂直な方向にも移動させることを特徴と
する試料ステージ。1. An expandable joint for airtightness is projected from an opening formed in a part of a wall of the vacuum chamber toward the inside of the vacuum chamber, and a sample is mounted on the projected end of the joint. The mounting member is
The sample mounting member is supported and moved to a space outside the vacuum chamber, which is airtightly fixed so as to separate the inside and the outside of the vacuum chamber, and is separated by the joint and the sample mounting member. A moving mechanism is disposed in proximity to the sample mounting member, and the moving mechanism moves the sample mounting member along a direction toward the inside of the vacuum chamber and is perpendicular to the direction. A sample stage that can be moved in any direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987139540U JPH0628776Y2 (en) | 1987-09-11 | 1987-09-11 | Sample stage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987139540U JPH0628776Y2 (en) | 1987-09-11 | 1987-09-11 | Sample stage |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6444555U JPS6444555U (en) | 1989-03-16 |
| JPH0628776Y2 true JPH0628776Y2 (en) | 1994-08-03 |
Family
ID=31402892
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987139540U Expired - Lifetime JPH0628776Y2 (en) | 1987-09-11 | 1987-09-11 | Sample stage |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0628776Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9159527B2 (en) | 2003-10-16 | 2015-10-13 | Carl Zeiss Microscopy, Llc | Systems and methods for a gas field ionization source |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60227347A (en) * | 1984-04-25 | 1985-11-12 | Hitachi Ltd | Scanning type electron microscope |
| JPS6119042A (en) * | 1984-07-04 | 1986-01-27 | Hitachi Ltd | Sample chamber for charged particle ray device |
-
1987
- 1987-09-11 JP JP1987139540U patent/JPH0628776Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6444555U (en) | 1989-03-16 |
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