JPH0624124Y2 - Scanning electron microscope - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a scanning microscope, and more particularly to a device that prevents the influence of disturbance such as sound.

[Prior Art] FIG. 2 schematically shows a conventional device. In FIG. 2, an electron microscope column 4 including, for example, an electron gun 1, an electron optical system 2, and a sample chamber 3 is supported by a base plate 5 on which the electron microscope column 4 is mounted. Reference numeral 6 denotes an exhaust device for exhausting the electron gun column 4, and the exhaust device 6 is protected by being covered with a cover 7 fixed to the base plate 5. The base plate 5 on which the electron microscope column 4 is mounted is mounted on the main body mount 9 via a vibration isolator such as spring coils 8a, 8b, 8c and 8d (8c and 8d are not shown). There is.

In the apparatus configured as described above, the relative position between the electron beam and the sample is changed due to the vibration of the floor B on which the scanning electron microscope is installed, which adversely affects the image observation. Therefore, floor B
The vibration or the like is absorbed or damped by the vibration isolation device such as the spring coil.

[Problems to be Solved by the Invention] However, in the device configured as described above, the cover 7 for protecting the exhaust device 6 is directly fixed to the base plate 5, so that the cover 7 may be damaged by a disturbance such as a sound. There is a drawback that the image is adversely affected because it vibrates, and this vibration vibrates the electron microscope column 4 to change the relative position between the electron beam and the sample.

An object of the present invention is to provide a scanning electron microscope which eliminates such drawbacks and prevents the influence of disturbance such as sound.

[Means for Solving the Problems] The present invention for achieving the object is to provide a base plate disposed on a frame via a vibration isolating member, an electron gun disposed on the base plate, an electron optical system, In an electron microscope column with a built-in sample chamber, an exhaust device arranged on the base plate to exhaust the electron microscope column, and a device in which the exhaust device is covered with a cover, the cover does not contact the base plate. It is characterized in that it is configured to be fixed to the pedestal in this state.

[Embodiment] An embodiment of the present invention will be described in detail below with reference to the drawings.

FIG. 1 is a schematic configuration diagram of an embodiment of the present invention. The same components as those of the conventional device are designated by the same reference numerals and the description thereof will be omitted. In FIG. 1, 10a, 10b, 10c, 10
Reference characters d (10c and 10d are not shown) are columns for supporting the cover 7 on the main frame 9, and each column penetrates the column through holes 11 formed in the base plate 5 without contacting them. In the apparatus configured as described above, even if the cover 7 vibrates due to the influence of external disturbance such as sound, the support plate for supporting the cover is not in contact with the base plate 5. Therefore, the vibration of the cover 7 is caused by the base plate 5. Therefore, since the electron microscope column 4 does not vibrate, the relative position between the electron beam and the sample is not changed and the image observation is not adversely affected.

The above is an example, and can be modified and implemented. In the above-described embodiment, the cover is attached to the pedestal by using the columns without contacting the base plate, but the cover may be attached to the floor B without contacting the base plate.

[Advantages of the Invention] As described in detail above, according to the present invention, the cover for protecting the exhaust device is fixed to the base without contacting the base plate, so that the relative position of the electron beam and the sample is changed. There is provided a scanning electron microscope capable of observing an image without performing the scanning.

[Brief description of drawings]

FIG. 1 is a schematic diagram of an embodiment of the present invention, and FIG. 2 is a diagram for explaining a conventional technique. 1: electron gun, 2: electron optical system, 3: sample chamber, 4: electron microscope column, 5: base plate, 6: exhaust device, 7:
Covers 8a, 8b, ...: Spring coils, 9: Main body mount, 10a, 10b, ...: Posts, 11: Post through holes.

Claims (1)

[Scope of utility model registration request] 1. A base plate arranged on a pedestal via a vibration-proof member, and an electron gun arranged on the base plate.
In an electron microscope system including an electron optical system and a sample chamber, an exhaust device arranged on the base plate for exhausting the electron microscope column, and a device in which the exhaust device is covered with a cover, A scanning electron microscope, characterized in that the scanning electron microscope is configured to be fixed to the pedestal without contacting the base plate.