JPH0596222A - 液滴下用ノズル - Google Patents

液滴下用ノズル

Info

Publication number
JPH0596222A
JPH0596222A JP3360602A JP36060291A JPH0596222A JP H0596222 A JPH0596222 A JP H0596222A JP 3360602 A JP3360602 A JP 3360602A JP 36060291 A JP36060291 A JP 36060291A JP H0596222 A JPH0596222 A JP H0596222A
Authority
JP
Japan
Prior art keywords
diameter pipe
nozzle
end portion
small
small diameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3360602A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0585224B2 (enExample
Inventor
Muneo Nakayama
宗雄 中山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Ohka Kogyo Co Ltd
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Priority to JP3360602A priority Critical patent/JPH0596222A/ja
Publication of JPH0596222A publication Critical patent/JPH0596222A/ja
Publication of JPH0585224B2 publication Critical patent/JPH0585224B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Nozzles (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
JP3360602A 1991-12-27 1991-12-27 液滴下用ノズル Granted JPH0596222A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3360602A JPH0596222A (ja) 1991-12-27 1991-12-27 液滴下用ノズル

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3360602A JPH0596222A (ja) 1991-12-27 1991-12-27 液滴下用ノズル

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP57151351A Division JPS5939363A (ja) 1982-08-30 1982-08-30 液滴下用ノズル

Publications (2)

Publication Number Publication Date
JPH0596222A true JPH0596222A (ja) 1993-04-20
JPH0585224B2 JPH0585224B2 (enExample) 1993-12-06

Family

ID=18470118

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3360602A Granted JPH0596222A (ja) 1991-12-27 1991-12-27 液滴下用ノズル

Country Status (1)

Country Link
JP (1) JPH0596222A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6076979A (en) * 1997-07-25 2000-06-20 Dainippon Screen Mfg. Co., Ltd. Method of and apparatus for supplying developing solution onto substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6076979A (en) * 1997-07-25 2000-06-20 Dainippon Screen Mfg. Co., Ltd. Method of and apparatus for supplying developing solution onto substrate

Also Published As

Publication number Publication date
JPH0585224B2 (enExample) 1993-12-06

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Legal Events

Date Code Title Description
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 19940601