JPH0587937B2 - - Google Patents

Info

Publication number
JPH0587937B2
JPH0587937B2 JP2072198A JP7219890A JPH0587937B2 JP H0587937 B2 JPH0587937 B2 JP H0587937B2 JP 2072198 A JP2072198 A JP 2072198A JP 7219890 A JP7219890 A JP 7219890A JP H0587937 B2 JPH0587937 B2 JP H0587937B2
Authority
JP
Japan
Prior art keywords
tip
anode
arc
cathode
diameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2072198A
Other languages
English (en)
Japanese (ja)
Other versions
JPH03274648A (ja
Inventor
Hirohisa Iwabayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Priority to JP7219890A priority Critical patent/JPH03274648A/ja
Publication of JPH03274648A publication Critical patent/JPH03274648A/ja
Publication of JPH0587937B2 publication Critical patent/JPH0587937B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Discharge Lamp (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP7219890A 1990-03-23 1990-03-23 ショートアーク型水銀蒸気放電灯 Granted JPH03274648A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7219890A JPH03274648A (ja) 1990-03-23 1990-03-23 ショートアーク型水銀蒸気放電灯

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7219890A JPH03274648A (ja) 1990-03-23 1990-03-23 ショートアーク型水銀蒸気放電灯

Publications (2)

Publication Number Publication Date
JPH03274648A JPH03274648A (ja) 1991-12-05
JPH0587937B2 true JPH0587937B2 (en, 2012) 1993-12-20

Family

ID=13482295

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7219890A Granted JPH03274648A (ja) 1990-03-23 1990-03-23 ショートアーク型水銀蒸気放電灯

Country Status (1)

Country Link
JP (1) JPH03274648A (en, 2012)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3158972B2 (ja) * 1995-06-26 2001-04-23 ウシオ電機株式会社 ショートアーク型水銀ランプ及びその点灯方法
JP4897397B2 (ja) * 2005-12-27 2012-03-14 ハリソン東芝ライティング株式会社 紫外線照射装置
JP5278235B2 (ja) * 2009-08-03 2013-09-04 ウシオ電機株式会社 ショートアーク型放電ランプ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49119481A (en, 2012) * 1973-03-16 1974-11-14
JPS6059733A (ja) * 1983-09-13 1985-04-06 Ushio Inc 半導体露光装置

Also Published As

Publication number Publication date
JPH03274648A (ja) 1991-12-05

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