JPH0587933B2 - - Google Patents

Info

Publication number
JPH0587933B2
JPH0587933B2 JP63028353A JP2835388A JPH0587933B2 JP H0587933 B2 JPH0587933 B2 JP H0587933B2 JP 63028353 A JP63028353 A JP 63028353A JP 2835388 A JP2835388 A JP 2835388A JP H0587933 B2 JPH0587933 B2 JP H0587933B2
Authority
JP
Japan
Prior art keywords
electrode
ion beam
ion
electrostatic lens
center line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63028353A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01204341A (ja
Inventor
Tosha Kitamura
Tokuyuki Shikauchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Steel Works Ltd
Original Assignee
Japan Steel Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Steel Works Ltd filed Critical Japan Steel Works Ltd
Priority to JP63028353A priority Critical patent/JPH01204341A/ja
Publication of JPH01204341A publication Critical patent/JPH01204341A/ja
Publication of JPH0587933B2 publication Critical patent/JPH0587933B2/ja
Granted legal-status Critical Current

Links

JP63028353A 1988-02-08 1988-02-08 イオンビーム装置 Granted JPH01204341A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63028353A JPH01204341A (ja) 1988-02-08 1988-02-08 イオンビーム装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63028353A JPH01204341A (ja) 1988-02-08 1988-02-08 イオンビーム装置

Publications (2)

Publication Number Publication Date
JPH01204341A JPH01204341A (ja) 1989-08-16
JPH0587933B2 true JPH0587933B2 (enExample) 1993-12-20

Family

ID=12246242

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63028353A Granted JPH01204341A (ja) 1988-02-08 1988-02-08 イオンビーム装置

Country Status (1)

Country Link
JP (1) JPH01204341A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0703044D0 (en) * 2007-02-16 2007-03-28 Nordiko Technical Services Ltd Apparatus
US8673753B1 (en) * 2012-12-03 2014-03-18 Advanced Ion Beam Technology, Inc. Multi-energy ion implantation
EP3195326A4 (en) * 2014-09-16 2018-09-05 AGNI Energy, Inc. Alfvén-wave gyrating non-linear inertial-confinement reactor

Also Published As

Publication number Publication date
JPH01204341A (ja) 1989-08-16

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