JPH0587134B2 - - Google Patents

Info

Publication number
JPH0587134B2
JPH0587134B2 JP62189343A JP18934387A JPH0587134B2 JP H0587134 B2 JPH0587134 B2 JP H0587134B2 JP 62189343 A JP62189343 A JP 62189343A JP 18934387 A JP18934387 A JP 18934387A JP H0587134 B2 JPH0587134 B2 JP H0587134B2
Authority
JP
Japan
Prior art keywords
film
tungsten silicide
amorphous
metal silicide
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP62189343A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6433944A (en
Inventor
Michihide Ayukawa
Keizo Sakyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP62189343A priority Critical patent/JPS6433944A/ja
Publication of JPS6433944A publication Critical patent/JPS6433944A/ja
Publication of JPH0587134B2 publication Critical patent/JPH0587134B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP62189343A 1987-07-29 1987-07-29 Manufacture of semiconductor device Granted JPS6433944A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62189343A JPS6433944A (en) 1987-07-29 1987-07-29 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62189343A JPS6433944A (en) 1987-07-29 1987-07-29 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS6433944A JPS6433944A (en) 1989-02-03
JPH0587134B2 true JPH0587134B2 (enExample) 1993-12-15

Family

ID=16239744

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62189343A Granted JPS6433944A (en) 1987-07-29 1987-07-29 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS6433944A (enExample)

Also Published As

Publication number Publication date
JPS6433944A (en) 1989-02-03

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