JPH0586853B2 - - Google Patents
Info
- Publication number
- JPH0586853B2 JPH0586853B2 JP59098090A JP9809084A JPH0586853B2 JP H0586853 B2 JPH0586853 B2 JP H0586853B2 JP 59098090 A JP59098090 A JP 59098090A JP 9809084 A JP9809084 A JP 9809084A JP H0586853 B2 JPH0586853 B2 JP H0586853B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- gold
- germanium
- nickel
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9809084A JPS60242619A (ja) | 1984-05-16 | 1984-05-16 | 半導体オ−ム性電極の形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9809084A JPS60242619A (ja) | 1984-05-16 | 1984-05-16 | 半導体オ−ム性電極の形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60242619A JPS60242619A (ja) | 1985-12-02 |
| JPH0586853B2 true JPH0586853B2 (enrdf_load_stackoverflow) | 1993-12-14 |
Family
ID=14210641
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9809084A Granted JPS60242619A (ja) | 1984-05-16 | 1984-05-16 | 半導体オ−ム性電極の形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60242619A (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2761735B2 (ja) * | 1988-10-04 | 1998-06-04 | 株式会社村田製作所 | 耐熱性オーミック電極及び当該耐熱性オーミック電極の製造方法 |
| US5179041A (en) * | 1989-06-16 | 1993-01-12 | Sumitomo Electric Industries, Ltd. | Method for manufacturing an electrode structure for III-V compound semiconductor element |
| JPH0387067A (ja) * | 1989-06-16 | 1991-04-11 | Sumitomo Electric Ind Ltd | ３―５族化合物半導体素子の電極構造及びその形成方法 |
| JPH04298028A (ja) * | 1991-03-26 | 1992-10-21 | Murata Mfg Co Ltd | オーミック電極の形成方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5880872A (ja) * | 1981-11-09 | 1983-05-16 | Nippon Telegr & Teleph Corp <Ntt> | 半導体装置 |
| JPS58210665A (ja) * | 1982-06-02 | 1983-12-07 | Hitachi Ltd | 半導体装置 |
-
1984
- 1984-05-16 JP JP9809084A patent/JPS60242619A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60242619A (ja) | 1985-12-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |