JPH058672Y2 - - Google Patents
Info
- Publication number
- JPH058672Y2 JPH058672Y2 JP14611486U JP14611486U JPH058672Y2 JP H058672 Y2 JPH058672 Y2 JP H058672Y2 JP 14611486 U JP14611486 U JP 14611486U JP 14611486 U JP14611486 U JP 14611486U JP H058672 Y2 JPH058672 Y2 JP H058672Y2
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- susceptor
- reaction
- vapor phase
- shaft member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006243 chemical reaction Methods 0.000 claims description 43
- 238000001947 vapour-phase growth Methods 0.000 claims description 24
- 239000012495 reaction gas Substances 0.000 claims description 14
- 238000004140 cleaning Methods 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 claims description 9
- 235000012431 wafers Nutrition 0.000 description 16
- 239000000047 product Substances 0.000 description 12
- 238000000354 decomposition reaction Methods 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000012010 growth Effects 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 125000002524 organometallic group Chemical group 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14611486U JPH058672Y2 (US20020051482A1-20020502-M00012.png) | 1986-09-24 | 1986-09-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14611486U JPH058672Y2 (US20020051482A1-20020502-M00012.png) | 1986-09-24 | 1986-09-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6351432U JPS6351432U (US20020051482A1-20020502-M00012.png) | 1988-04-07 |
| JPH058672Y2 true JPH058672Y2 (US20020051482A1-20020502-M00012.png) | 1993-03-04 |
Family
ID=31058281
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14611486U Expired - Lifetime JPH058672Y2 (US20020051482A1-20020502-M00012.png) | 1986-09-24 | 1986-09-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH058672Y2 (US20020051482A1-20020502-M00012.png) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6090183B2 (ja) * | 2014-01-23 | 2017-03-08 | 信越半導体株式会社 | 気相成長装置の清掃又は点検方法及びエピタキシャルウェーハの製造方法 |
| JP6356004B2 (ja) * | 2014-08-05 | 2018-07-11 | 住友化学株式会社 | 反応容器の密閉構造、および基板処理装置 |
-
1986
- 1986-09-24 JP JP14611486U patent/JPH058672Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6351432U (US20020051482A1-20020502-M00012.png) | 1988-04-07 |
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