JPH058548B2 - - Google Patents

Info

Publication number
JPH058548B2
JPH058548B2 JP61112140A JP11214086A JPH058548B2 JP H058548 B2 JPH058548 B2 JP H058548B2 JP 61112140 A JP61112140 A JP 61112140A JP 11214086 A JP11214086 A JP 11214086A JP H058548 B2 JPH058548 B2 JP H058548B2
Authority
JP
Japan
Prior art keywords
signal
circuit
photographing
shutter
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61112140A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62271335A (ja
Inventor
Yoshihiro Hirata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP61112140A priority Critical patent/JPS62271335A/ja
Publication of JPS62271335A publication Critical patent/JPS62271335A/ja
Publication of JPH058548B2 publication Critical patent/JPH058548B2/ja
Granted legal-status Critical Current

Links

JP61112140A 1986-05-16 1986-05-16 電子顕微鏡における撮影装置 Granted JPS62271335A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61112140A JPS62271335A (ja) 1986-05-16 1986-05-16 電子顕微鏡における撮影装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61112140A JPS62271335A (ja) 1986-05-16 1986-05-16 電子顕微鏡における撮影装置

Publications (2)

Publication Number Publication Date
JPS62271335A JPS62271335A (ja) 1987-11-25
JPH058548B2 true JPH058548B2 (fr) 1993-02-02

Family

ID=14579214

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61112140A Granted JPS62271335A (ja) 1986-05-16 1986-05-16 電子顕微鏡における撮影装置

Country Status (1)

Country Link
JP (1) JPS62271335A (fr)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5120671A (en) * 1974-08-14 1976-02-19 Hitachi Ltd Kadenryushisenryono hyojisochi

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5120671A (en) * 1974-08-14 1976-02-19 Hitachi Ltd Kadenryushisenryono hyojisochi

Also Published As

Publication number Publication date
JPS62271335A (ja) 1987-11-25

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