JPH0584422B2 - - Google Patents

Info

Publication number
JPH0584422B2
JPH0584422B2 JP61022749A JP2274986A JPH0584422B2 JP H0584422 B2 JPH0584422 B2 JP H0584422B2 JP 61022749 A JP61022749 A JP 61022749A JP 2274986 A JP2274986 A JP 2274986A JP H0584422 B2 JPH0584422 B2 JP H0584422B2
Authority
JP
Japan
Prior art keywords
area
air
clean
air supply
cleanliness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61022749A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62182541A (ja
Inventor
Yoshinobu Suzuki
Mitsufusa Manabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimizu Construction Co Ltd
Original Assignee
Shimizu Construction Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimizu Construction Co Ltd filed Critical Shimizu Construction Co Ltd
Priority to JP61022749A priority Critical patent/JPS62182541A/ja
Publication of JPS62182541A publication Critical patent/JPS62182541A/ja
Publication of JPH0584422B2 publication Critical patent/JPH0584422B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/163—Clean air work stations, i.e. selected areas within a space which filtered air is passed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
JP61022749A 1986-02-04 1986-02-04 クリ−ンル−ム Granted JPS62182541A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61022749A JPS62182541A (ja) 1986-02-04 1986-02-04 クリ−ンル−ム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61022749A JPS62182541A (ja) 1986-02-04 1986-02-04 クリ−ンル−ム

Publications (2)

Publication Number Publication Date
JPS62182541A JPS62182541A (ja) 1987-08-10
JPH0584422B2 true JPH0584422B2 (fr) 1993-12-01

Family

ID=12091339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61022749A Granted JPS62182541A (ja) 1986-02-04 1986-02-04 クリ−ンル−ム

Country Status (1)

Country Link
JP (1) JPS62182541A (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2750304B2 (ja) * 1989-12-27 1998-05-13 東京エレクトロン株式会社 クリーンルーム
FI112533B (fi) * 1999-05-21 2003-12-15 Jeven Oy Menetelmä ilmanvaihdon järjestämiseksi ja ilmanvaihtojärjestely
JP2006275731A (ja) * 2005-03-29 2006-10-12 Shibuya Machinery Co Ltd 容器搬送装置
KR100626091B1 (ko) 2005-11-25 2006-09-20 (주)태연이엔지 에어샤워장치
JP2010223465A (ja) * 2009-03-23 2010-10-07 Dainippon Printing Co Ltd クリーン空調システム

Also Published As

Publication number Publication date
JPS62182541A (ja) 1987-08-10

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