JPH0584063B2 - - Google Patents

Info

Publication number
JPH0584063B2
JPH0584063B2 JP59037069A JP3706984A JPH0584063B2 JP H0584063 B2 JPH0584063 B2 JP H0584063B2 JP 59037069 A JP59037069 A JP 59037069A JP 3706984 A JP3706984 A JP 3706984A JP H0584063 B2 JPH0584063 B2 JP H0584063B2
Authority
JP
Japan
Prior art keywords
insulating film
abrasive grains
wiring metal
inorganic insulating
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59037069A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60180144A (ja
Inventor
Yoshinori Teto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kansai Nippon Electric Co Ltd
Original Assignee
Kansai Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kansai Nippon Electric Co Ltd filed Critical Kansai Nippon Electric Co Ltd
Priority to JP3706984A priority Critical patent/JPS60180144A/ja
Publication of JPS60180144A publication Critical patent/JPS60180144A/ja
Publication of JPH0584063B2 publication Critical patent/JPH0584063B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP3706984A 1984-02-27 1984-02-27 半導体素子製造方法 Granted JPS60180144A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3706984A JPS60180144A (ja) 1984-02-27 1984-02-27 半導体素子製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3706984A JPS60180144A (ja) 1984-02-27 1984-02-27 半導体素子製造方法

Publications (2)

Publication Number Publication Date
JPS60180144A JPS60180144A (ja) 1985-09-13
JPH0584063B2 true JPH0584063B2 (cs) 1993-11-30

Family

ID=12487257

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3706984A Granted JPS60180144A (ja) 1984-02-27 1984-02-27 半導体素子製造方法

Country Status (1)

Country Link
JP (1) JPS60180144A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0789551B2 (ja) * 1986-02-13 1995-09-27 日本電気株式会社 半導体装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5139836B2 (cs) * 1971-12-13 1976-10-29
JPS5187578A (ja) * 1975-01-30 1976-07-31 Matsushita Electric Works Ltd Kagakumetsukyokibanno seiho

Also Published As

Publication number Publication date
JPS60180144A (ja) 1985-09-13

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