JPH0580983B2 - - Google Patents
Info
- Publication number
- JPH0580983B2 JPH0580983B2 JP61213346A JP21334686A JPH0580983B2 JP H0580983 B2 JPH0580983 B2 JP H0580983B2 JP 61213346 A JP61213346 A JP 61213346A JP 21334686 A JP21334686 A JP 21334686A JP H0580983 B2 JPH0580983 B2 JP H0580983B2
- Authority
- JP
- Japan
- Prior art keywords
- master
- spindle motor
- master disc
- defect
- disc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000007547 defect Effects 0.000 claims description 42
- 238000001514 detection method Methods 0.000 claims description 30
- 238000007689 inspection Methods 0.000 claims description 26
- 230000003287 optical effect Effects 0.000 description 18
- 238000000034 method Methods 0.000 description 15
- 230000002950 deficient Effects 0.000 description 11
- 239000011521 glass Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 201000009310 astigmatism Diseases 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9506—Optical discs
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21334686A JPS6367550A (ja) | 1986-09-10 | 1986-09-10 | 情報記録原盤の欠陥検査装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21334686A JPS6367550A (ja) | 1986-09-10 | 1986-09-10 | 情報記録原盤の欠陥検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6367550A JPS6367550A (ja) | 1988-03-26 |
JPH0580983B2 true JPH0580983B2 (de) | 1993-11-11 |
Family
ID=16637634
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21334686A Granted JPS6367550A (ja) | 1986-09-10 | 1986-09-10 | 情報記録原盤の欠陥検査装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6367550A (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01262445A (ja) * | 1988-04-13 | 1989-10-19 | Toshiba Corp | 表面検査装置 |
JPH0283404A (ja) * | 1988-09-21 | 1990-03-23 | Anritsu Corp | 平坦度測定方法 |
DE19904427B4 (de) * | 1999-02-04 | 2004-12-16 | Basler Ag | Verfahren zum Prüfen von rotationssymmetrischen Gegenständen |
JP2011106815A (ja) * | 2009-11-12 | 2011-06-02 | Arc Harima Kk | 表面検査方法および表面検査装置 |
JP6145970B2 (ja) * | 2012-06-28 | 2017-06-14 | 株式会社大林組 | 表面粗さ計測装置及び計測方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57161641A (en) * | 1981-03-31 | 1982-10-05 | Olympus Optical Co Ltd | Inspecting device for defect of surface |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55103854U (de) * | 1979-01-10 | 1980-07-19 |
-
1986
- 1986-09-10 JP JP21334686A patent/JPS6367550A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57161641A (en) * | 1981-03-31 | 1982-10-05 | Olympus Optical Co Ltd | Inspecting device for defect of surface |
Also Published As
Publication number | Publication date |
---|---|
JPS6367550A (ja) | 1988-03-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |