JPH0580554B2 - - Google Patents

Info

Publication number
JPH0580554B2
JPH0580554B2 JP61134029A JP13402986A JPH0580554B2 JP H0580554 B2 JPH0580554 B2 JP H0580554B2 JP 61134029 A JP61134029 A JP 61134029A JP 13402986 A JP13402986 A JP 13402986A JP H0580554 B2 JPH0580554 B2 JP H0580554B2
Authority
JP
Japan
Prior art keywords
melt
heating
evaporation
boat
belt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61134029A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62290863A (ja
Inventor
Masahiro Sone
Masahiro Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Business Innovation Corp
Original Assignee
Fuji Xerox Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Xerox Co Ltd filed Critical Fuji Xerox Co Ltd
Priority to JP13402986A priority Critical patent/JPS62290863A/ja
Publication of JPS62290863A publication Critical patent/JPS62290863A/ja
Publication of JPH0580554B2 publication Critical patent/JPH0580554B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP13402986A 1986-06-09 1986-06-09 真空蒸着用蒸発方法 Granted JPS62290863A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13402986A JPS62290863A (ja) 1986-06-09 1986-06-09 真空蒸着用蒸発方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13402986A JPS62290863A (ja) 1986-06-09 1986-06-09 真空蒸着用蒸発方法

Publications (2)

Publication Number Publication Date
JPS62290863A JPS62290863A (ja) 1987-12-17
JPH0580554B2 true JPH0580554B2 (enrdf_load_stackoverflow) 1993-11-09

Family

ID=15118711

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13402986A Granted JPS62290863A (ja) 1986-06-09 1986-06-09 真空蒸着用蒸発方法

Country Status (1)

Country Link
JP (1) JPS62290863A (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59177365A (ja) * 1983-03-24 1984-10-08 Matsushita Electric Ind Co Ltd 蒸発方法とその装置

Also Published As

Publication number Publication date
JPS62290863A (ja) 1987-12-17

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