JPS62290863A - 真空蒸着用蒸発方法 - Google Patents
真空蒸着用蒸発方法Info
- Publication number
- JPS62290863A JPS62290863A JP13402986A JP13402986A JPS62290863A JP S62290863 A JPS62290863 A JP S62290863A JP 13402986 A JP13402986 A JP 13402986A JP 13402986 A JP13402986 A JP 13402986A JP S62290863 A JPS62290863 A JP S62290863A
- Authority
- JP
- Japan
- Prior art keywords
- heating
- melt
- belt
- conveying means
- liquid film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001704 evaporation Methods 0.000 title claims abstract description 19
- 230000008020 evaporation Effects 0.000 title claims description 8
- 238000000034 method Methods 0.000 title description 17
- 238000001771 vacuum deposition Methods 0.000 title description 6
- 238000010438 heat treatment Methods 0.000 claims abstract description 41
- 239000000155 melt Substances 0.000 claims abstract description 29
- 239000000463 material Substances 0.000 claims abstract description 22
- 239000007788 liquid Substances 0.000 claims abstract description 15
- 238000007740 vapor deposition Methods 0.000 claims abstract description 14
- 230000008021 deposition Effects 0.000 claims description 12
- 238000007738 vacuum evaporation Methods 0.000 claims description 7
- 239000000126 substance Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 abstract description 11
- 239000012768 molten material Substances 0.000 abstract description 7
- 210000002500 microbody Anatomy 0.000 abstract 1
- 239000010408 film Substances 0.000 description 23
- 238000000151 deposition Methods 0.000 description 11
- 239000002184 metal Substances 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 9
- 238000009835 boiling Methods 0.000 description 6
- 230000008018 melting Effects 0.000 description 6
- 238000002844 melting Methods 0.000 description 6
- 239000010935 stainless steel Substances 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 108091008695 photoreceptors Proteins 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 210000004709 eyebrow Anatomy 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000013021 overheating Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 210000004303 peritoneum Anatomy 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13402986A JPS62290863A (ja) | 1986-06-09 | 1986-06-09 | 真空蒸着用蒸発方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13402986A JPS62290863A (ja) | 1986-06-09 | 1986-06-09 | 真空蒸着用蒸発方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62290863A true JPS62290863A (ja) | 1987-12-17 |
| JPH0580554B2 JPH0580554B2 (enrdf_load_stackoverflow) | 1993-11-09 |
Family
ID=15118711
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13402986A Granted JPS62290863A (ja) | 1986-06-09 | 1986-06-09 | 真空蒸着用蒸発方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62290863A (enrdf_load_stackoverflow) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59177365A (ja) * | 1983-03-24 | 1984-10-08 | Matsushita Electric Ind Co Ltd | 蒸発方法とその装置 |
-
1986
- 1986-06-09 JP JP13402986A patent/JPS62290863A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59177365A (ja) * | 1983-03-24 | 1984-10-08 | Matsushita Electric Ind Co Ltd | 蒸発方法とその装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0580554B2 (enrdf_load_stackoverflow) | 1993-11-09 |
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