JPH0579183B2 - - Google Patents
Info
- Publication number
- JPH0579183B2 JPH0579183B2 JP62088261A JP8826187A JPH0579183B2 JP H0579183 B2 JPH0579183 B2 JP H0579183B2 JP 62088261 A JP62088261 A JP 62088261A JP 8826187 A JP8826187 A JP 8826187A JP H0579183 B2 JPH0579183 B2 JP H0579183B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- resistance
- metal layer
- resistivity metal
- resistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/201—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits
- H10D84/204—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits of combinations of diodes or capacitors or resistors
- H10D84/209—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of only components covered by H10D1/00 or H10D8/00, e.g. RLC circuits of combinations of diodes or capacitors or resistors of only resistors
Landscapes
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62088261A JPS63252458A (ja) | 1987-04-09 | 1987-04-09 | 半導体装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62088261A JPS63252458A (ja) | 1987-04-09 | 1987-04-09 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63252458A JPS63252458A (ja) | 1988-10-19 |
| JPH0579183B2 true JPH0579183B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-11-01 |
Family
ID=13937938
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62088261A Granted JPS63252458A (ja) | 1987-04-09 | 1987-04-09 | 半導体装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63252458A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080253047A1 (en) * | 2004-06-01 | 2008-10-16 | Hirotaka Takihara | Semiconductor Device and Electronic Device |
-
1987
- 1987-04-09 JP JP62088261A patent/JPS63252458A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63252458A (ja) | 1988-10-19 |