JPH0578934B2 - - Google Patents
Info
- Publication number
- JPH0578934B2 JPH0578934B2 JP13189085A JP13189085A JPH0578934B2 JP H0578934 B2 JPH0578934 B2 JP H0578934B2 JP 13189085 A JP13189085 A JP 13189085A JP 13189085 A JP13189085 A JP 13189085A JP H0578934 B2 JPH0578934 B2 JP H0578934B2
- Authority
- JP
- Japan
- Prior art keywords
- processing
- process tube
- fluid
- tube
- processing fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000012530 fluid Substances 0.000 claims description 52
- 238000000034 method Methods 0.000 claims description 40
- 238000007599 discharging Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 11
- 239000004065 semiconductor Substances 0.000 description 10
- 238000009792 diffusion process Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13189085A JPS61290713A (ja) | 1985-06-19 | 1985-06-19 | 処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13189085A JPS61290713A (ja) | 1985-06-19 | 1985-06-19 | 処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61290713A JPS61290713A (ja) | 1986-12-20 |
| JPH0578934B2 true JPH0578934B2 (zh) | 1993-10-29 |
Family
ID=15068539
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13189085A Granted JPS61290713A (ja) | 1985-06-19 | 1985-06-19 | 処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61290713A (zh) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2213835B (en) * | 1987-12-18 | 1992-07-08 | Gen Electric Co Plc | Deposition apparatus |
| JPH02106822U (zh) * | 1989-02-13 | 1990-08-24 | ||
| US5320680A (en) * | 1991-04-25 | 1994-06-14 | Silicon Valley Group, Inc. | Primary flow CVD apparatus comprising gas preheater and means for substantially eddy-free gas flow |
| US6005225A (en) * | 1997-03-28 | 1999-12-21 | Silicon Valley Group, Inc. | Thermal processing apparatus |
| US6059567A (en) * | 1998-02-10 | 2000-05-09 | Silicon Valley Group, Inc. | Semiconductor thermal processor with recirculating heater exhaust cooling system |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5431676B2 (zh) * | 1972-05-02 | 1979-10-08 | ||
| JPS5136984A (ja) * | 1974-09-24 | 1976-03-29 | Nippon Paint Co Ltd | Gensuishindokyokusennoyomitorihoho oyobi sonosochi |
| JPS5621439U (zh) * | 1979-07-27 | 1981-02-25 | ||
| JPS59213127A (ja) * | 1983-05-19 | 1984-12-03 | Pioneer Electronic Corp | 炉心管 |
-
1985
- 1985-06-19 JP JP13189085A patent/JPS61290713A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61290713A (ja) | 1986-12-20 |
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