JPS5136984A - Gensuishindokyokusennoyomitorihoho oyobi sonosochi - Google Patents

Gensuishindokyokusennoyomitorihoho oyobi sonosochi

Info

Publication number
JPS5136984A
JPS5136984A JP11015274A JP11015274A JPS5136984A JP S5136984 A JPS5136984 A JP S5136984A JP 11015274 A JP11015274 A JP 11015274A JP 11015274 A JP11015274 A JP 11015274A JP S5136984 A JPS5136984 A JP S5136984A
Authority
JP
Japan
Prior art keywords
gensuishindokyokusennoyomitorihoho
oyobi sonosochi
sonosochi
oyobi
gensuishindokyokusennoyomitorihoho oyobi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11015274A
Other languages
English (en)
Inventor
Takashi Yamamoto
Shoji Ikeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Paint Co Ltd
Original Assignee
Nippon Paint Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Paint Co Ltd filed Critical Nippon Paint Co Ltd
Priority to JP11015274A priority Critical patent/JPS5136984A/ja
Publication of JPS5136984A publication Critical patent/JPS5136984A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Frequencies, Analyzing Spectra (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
JP11015274A 1974-09-24 1974-09-24 Gensuishindokyokusennoyomitorihoho oyobi sonosochi Pending JPS5136984A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11015274A JPS5136984A (ja) 1974-09-24 1974-09-24 Gensuishindokyokusennoyomitorihoho oyobi sonosochi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11015274A JPS5136984A (ja) 1974-09-24 1974-09-24 Gensuishindokyokusennoyomitorihoho oyobi sonosochi

Publications (1)

Publication Number Publication Date
JPS5136984A true JPS5136984A (ja) 1976-03-29

Family

ID=14528359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11015274A Pending JPS5136984A (ja) 1974-09-24 1974-09-24 Gensuishindokyokusennoyomitorihoho oyobi sonosochi

Country Status (1)

Country Link
JP (1) JPS5136984A (ja)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5575344U (ja) * 1978-11-20 1980-05-24
JPS55139410U (ja) * 1979-03-28 1980-10-04
JPS58142935U (ja) * 1982-03-19 1983-09-27 東芝機械株式会社 気相成長装置のノズル
JPS59151434U (ja) * 1983-03-28 1984-10-11 東芝機械株式会社 気相成長装置のノズル
JPS61290713A (ja) * 1985-06-19 1986-12-20 Hitachi Ltd 処理装置
JPS6323313A (ja) * 1987-06-19 1988-01-30 Hitachi Ltd 半導体ウエハの熱処理方法
JPH03285328A (ja) * 1990-03-31 1991-12-16 Tokyo Electron Sagami Ltd 縦型熱処理装置
JPH0945628A (ja) * 1995-07-28 1997-02-14 Nec Corp 半導体製造装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5575344U (ja) * 1978-11-20 1980-05-24
JPS55139410U (ja) * 1979-03-28 1980-10-04
JPS58142935U (ja) * 1982-03-19 1983-09-27 東芝機械株式会社 気相成長装置のノズル
JPS59151434U (ja) * 1983-03-28 1984-10-11 東芝機械株式会社 気相成長装置のノズル
JPS61290713A (ja) * 1985-06-19 1986-12-20 Hitachi Ltd 処理装置
JPS6323313A (ja) * 1987-06-19 1988-01-30 Hitachi Ltd 半導体ウエハの熱処理方法
JPH03285328A (ja) * 1990-03-31 1991-12-16 Tokyo Electron Sagami Ltd 縦型熱処理装置
JPH0945628A (ja) * 1995-07-28 1997-02-14 Nec Corp 半導体製造装置

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