JPS5136984A - Gensuishindokyokusennoyomitorihoho oyobi sonosochi - Google Patents
Gensuishindokyokusennoyomitorihoho oyobi sonosochiInfo
- Publication number
- JPS5136984A JPS5136984A JP11015274A JP11015274A JPS5136984A JP S5136984 A JPS5136984 A JP S5136984A JP 11015274 A JP11015274 A JP 11015274A JP 11015274 A JP11015274 A JP 11015274A JP S5136984 A JPS5136984 A JP S5136984A
- Authority
- JP
- Japan
- Prior art keywords
- gensuishindokyokusennoyomitorihoho
- oyobi sonosochi
- sonosochi
- oyobi
- gensuishindokyokusennoyomitorihoho oyobi
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Frequencies, Analyzing Spectra (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11015274A JPS5136984A (ja) | 1974-09-24 | 1974-09-24 | Gensuishindokyokusennoyomitorihoho oyobi sonosochi |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11015274A JPS5136984A (ja) | 1974-09-24 | 1974-09-24 | Gensuishindokyokusennoyomitorihoho oyobi sonosochi |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5136984A true JPS5136984A (ja) | 1976-03-29 |
Family
ID=14528359
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11015274A Pending JPS5136984A (ja) | 1974-09-24 | 1974-09-24 | Gensuishindokyokusennoyomitorihoho oyobi sonosochi |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5136984A (ja) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5575344U (ja) * | 1978-11-20 | 1980-05-24 | ||
JPS55139410U (ja) * | 1979-03-28 | 1980-10-04 | ||
JPS58142935U (ja) * | 1982-03-19 | 1983-09-27 | 東芝機械株式会社 | 気相成長装置のノズル |
JPS59151434U (ja) * | 1983-03-28 | 1984-10-11 | 東芝機械株式会社 | 気相成長装置のノズル |
JPS61290713A (ja) * | 1985-06-19 | 1986-12-20 | Hitachi Ltd | 処理装置 |
JPS6323313A (ja) * | 1987-06-19 | 1988-01-30 | Hitachi Ltd | 半導体ウエハの熱処理方法 |
JPH03285328A (ja) * | 1990-03-31 | 1991-12-16 | Tokyo Electron Sagami Ltd | 縦型熱処理装置 |
JPH0945628A (ja) * | 1995-07-28 | 1997-02-14 | Nec Corp | 半導体製造装置 |
-
1974
- 1974-09-24 JP JP11015274A patent/JPS5136984A/ja active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5575344U (ja) * | 1978-11-20 | 1980-05-24 | ||
JPS55139410U (ja) * | 1979-03-28 | 1980-10-04 | ||
JPS58142935U (ja) * | 1982-03-19 | 1983-09-27 | 東芝機械株式会社 | 気相成長装置のノズル |
JPS59151434U (ja) * | 1983-03-28 | 1984-10-11 | 東芝機械株式会社 | 気相成長装置のノズル |
JPS61290713A (ja) * | 1985-06-19 | 1986-12-20 | Hitachi Ltd | 処理装置 |
JPS6323313A (ja) * | 1987-06-19 | 1988-01-30 | Hitachi Ltd | 半導体ウエハの熱処理方法 |
JPH03285328A (ja) * | 1990-03-31 | 1991-12-16 | Tokyo Electron Sagami Ltd | 縦型熱処理装置 |
JPH0945628A (ja) * | 1995-07-28 | 1997-02-14 | Nec Corp | 半導体製造装置 |
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