JPH0578181B2 - - Google Patents

Info

Publication number
JPH0578181B2
JPH0578181B2 JP57171824A JP17182482A JPH0578181B2 JP H0578181 B2 JPH0578181 B2 JP H0578181B2 JP 57171824 A JP57171824 A JP 57171824A JP 17182482 A JP17182482 A JP 17182482A JP H0578181 B2 JPH0578181 B2 JP H0578181B2
Authority
JP
Japan
Prior art keywords
film
contact hole
conductor film
etching
conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57171824A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5961147A (ja
Inventor
Masaki Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP17182482A priority Critical patent/JPS5961147A/ja
Publication of JPS5961147A publication Critical patent/JPS5961147A/ja
Publication of JPH0578181B2 publication Critical patent/JPH0578181B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP17182482A 1982-09-30 1982-09-30 半導体装置の製造方法 Granted JPS5961147A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17182482A JPS5961147A (ja) 1982-09-30 1982-09-30 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17182482A JPS5961147A (ja) 1982-09-30 1982-09-30 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5961147A JPS5961147A (ja) 1984-04-07
JPH0578181B2 true JPH0578181B2 (enrdf_load_stackoverflow) 1993-10-28

Family

ID=15930417

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17182482A Granted JPS5961147A (ja) 1982-09-30 1982-09-30 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5961147A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4796081A (en) * 1986-05-02 1989-01-03 Advanced Micro Devices, Inc. Low resistance metal contact for silicon devices
JP3413876B2 (ja) * 1992-07-08 2003-06-09 セイコーエプソン株式会社 半導体装置
KR20070047624A (ko) * 2005-11-02 2007-05-07 주성엔지니어링(주) 박막 패턴 형성 방법
JP2013075740A (ja) 2011-09-30 2013-04-25 Brother Industries Ltd シート搬送装置及び画像形成装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5380183A (en) * 1976-12-25 1978-07-15 Fujitsu Ltd Semiconductor device
JPS58155741A (ja) * 1982-03-12 1983-09-16 Hitachi Ltd 多層配線構造の製造方法

Also Published As

Publication number Publication date
JPS5961147A (ja) 1984-04-07

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