JPH0577907B2 - - Google Patents

Info

Publication number
JPH0577907B2
JPH0577907B2 JP2136739A JP13673990A JPH0577907B2 JP H0577907 B2 JPH0577907 B2 JP H0577907B2 JP 2136739 A JP2136739 A JP 2136739A JP 13673990 A JP13673990 A JP 13673990A JP H0577907 B2 JPH0577907 B2 JP H0577907B2
Authority
JP
Japan
Prior art keywords
valve
actuator
valve body
cylindrical body
port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2136739A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0434275A (ja
Inventor
Akira Nakazawa
Hiroshi Oozasa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
S Tec Inc
Original Assignee
S Tec Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by S Tec Inc filed Critical S Tec Inc
Priority to JP2136739A priority Critical patent/JPH0434275A/ja
Priority to US07/704,348 priority patent/US5145147A/en
Publication of JPH0434275A publication Critical patent/JPH0434275A/ja
Publication of JPH0577907B2 publication Critical patent/JPH0577907B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/007—Piezoelectric stacks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • F16K41/12—Spindle sealings with diaphragm, e.g. shaped as bellows or tube with approximately flat diaphragm

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
JP2136739A 1990-05-26 1990-05-26 常閉型流体制御バルブ Granted JPH0434275A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2136739A JPH0434275A (ja) 1990-05-26 1990-05-26 常閉型流体制御バルブ
US07/704,348 US5145147A (en) 1990-05-26 1991-05-23 Normally closed-type fluid control valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2136739A JPH0434275A (ja) 1990-05-26 1990-05-26 常閉型流体制御バルブ

Publications (2)

Publication Number Publication Date
JPH0434275A JPH0434275A (ja) 1992-02-05
JPH0577907B2 true JPH0577907B2 (US07534539-20090519-C00280.png) 1993-10-27

Family

ID=15182378

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2136739A Granted JPH0434275A (ja) 1990-05-26 1990-05-26 常閉型流体制御バルブ

Country Status (2)

Country Link
US (1) US5145147A (US07534539-20090519-C00280.png)
JP (1) JPH0434275A (US07534539-20090519-C00280.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6455487A (en) * 1987-10-14 1989-03-02 Hitachi Metals Ltd Fluid flow rate control valve
CN102977802A (zh) * 2012-12-29 2013-03-20 湘潭电机股份有限公司 一种不腐蚀铜的丙烯酸酯结构胶粘剂

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5785297A (en) * 1996-07-16 1998-07-28 Millipore Corporation Valve mechanism
DE19802723A1 (de) * 1998-01-24 1999-08-12 Kuesters Beloit Gmbh & Co Kg Walze
JP4064527B2 (ja) 1998-06-02 2008-03-19 Ｎｅｃトーキン株式会社 アクチュエータ装置
JP4287935B2 (ja) * 1999-01-14 2009-07-01 株式会社堀場エステック ピエゾ方式の流量調整弁駆動部構造
JP2001317646A (ja) * 2000-05-08 2001-11-16 Smc Corp 圧電式流体制御弁
US6679476B2 (en) 2000-08-08 2004-01-20 Puregress, Inc. Control valves
US6604515B2 (en) 2001-06-20 2003-08-12 General Electric Company Temperature control for turbocharged engine
US7428913B2 (en) * 2005-04-26 2008-09-30 Mks Instruments, Inc. Valve assembly having articulating rigid seating surface
JP4743763B2 (ja) * 2006-01-18 2011-08-10 株式会社フジキン 圧電素子駆動式金属ダイヤフラム型制御弁
TWI435196B (zh) * 2009-10-15 2014-04-21 Pivotal Systems Corp 氣體流量控制方法及裝置
JP4951091B2 (ja) * 2010-05-28 2012-06-13 株式会社フジキン 圧電素子駆動式金属ダイヤフラム型制御弁
US9400004B2 (en) 2010-11-29 2016-07-26 Pivotal Systems Corporation Transient measurements of mass flow controllers
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
JP5775110B2 (ja) * 2013-03-26 2015-09-09 株式会社フジキン 流量制御装置用の流量制御弁
KR102155810B1 (ko) * 2013-09-04 2020-09-14 가부시키가이샤 호리바 에스텍 인터레이스 리프팅 기구
KR102327921B1 (ko) 2014-06-13 2021-11-18 가부시키가이샤 호리바 에스텍 유체와 증기용 고전도도 밸브
US10113665B2 (en) 2015-06-17 2018-10-30 Vistadeltek, Llc Low hysteresis diaphragm for a valve
CN107850222B (zh) 2015-07-09 2022-11-01 威斯塔德尔特有限责任公司 阀中的控制板
US10401202B2 (en) 2015-07-10 2019-09-03 Pivotal Systems Corporation Method and apparatus for gas flow control
WO2017033423A1 (ja) * 2015-08-21 2017-03-02 株式会社フジキン 圧電式リニアアクチュエータ、圧電駆動バルブ及び流量制御装置
DE102016112115A1 (de) * 2016-07-01 2018-01-04 Bürkert Werke GmbH Ventillinearantrieb sowie Ventil
WO2018100968A1 (ja) * 2016-11-30 2018-06-07 株式会社フジキン バルブ装置、このバルブ装置を用いた流量制御方法および半導体製造方法
US10983537B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
US10364897B2 (en) 2017-06-05 2019-07-30 Vistadeltek, Llc Control plate for a high conductance valve
US11248708B2 (en) 2017-06-05 2022-02-15 Illinois Tool Works Inc. Control plate for a high conductance valve
CN114658860A (zh) 2017-06-05 2022-06-24 伊利诺斯工具公司 用于高传导性阀的控制板
US10458553B1 (en) 2017-06-05 2019-10-29 Vistadeltek, Llc Control plate for a high conductive valve
JP7244530B2 (ja) 2017-11-21 2023-03-22 イリノイ トゥール ワークス インコーポレイティド プッシュアクチュエーターの小型円形リンク機構
CN109282073A (zh) * 2018-09-20 2019-01-29 北京七星华创流量计有限公司 压电阀驱动器以及压电阀
DE102020115057A1 (de) * 2020-06-05 2021-12-09 Bürkert Werke GmbH & Co. KG Ventillinearantrieb sowie Ventil

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4008876A (en) * 1975-06-09 1977-02-22 The Singer Company Solenoid valve
US4043532A (en) * 1976-01-29 1977-08-23 New England Union Co. Valve with electrically operated actuator
JPH0429171Y2 (US07534539-20090519-C00280.png) * 1987-01-28 1992-07-15

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6455487A (en) * 1987-10-14 1989-03-02 Hitachi Metals Ltd Fluid flow rate control valve
CN102977802A (zh) * 2012-12-29 2013-03-20 湘潭电机股份有限公司 一种不腐蚀铜的丙烯酸酯结构胶粘剂

Also Published As

Publication number Publication date
US5145147A (en) 1992-09-08
JPH0434275A (ja) 1992-02-05

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