JPH0577342B2 - - Google Patents

Info

Publication number
JPH0577342B2
JPH0577342B2 JP63150281A JP15028188A JPH0577342B2 JP H0577342 B2 JPH0577342 B2 JP H0577342B2 JP 63150281 A JP63150281 A JP 63150281A JP 15028188 A JP15028188 A JP 15028188A JP H0577342 B2 JPH0577342 B2 JP H0577342B2
Authority
JP
Japan
Prior art keywords
semiconductor substrate
electrode
capacitor
insulating film
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63150281A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01152661A (ja
Inventor
Hideo Sunami
Tokuo Kure
Yoshifumi Kawamoto
Masanobu Myao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP63150281A priority Critical patent/JPH01152661A/ja
Publication of JPH01152661A publication Critical patent/JPH01152661A/ja
Publication of JPH0577342B2 publication Critical patent/JPH0577342B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
    • H10B12/37—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor being at least partially in a trench in the substrate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
    • H10B12/39—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor and the transistor being in a same trench
    • H10B12/395—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor and the transistor being in a same trench the transistor being vertical

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
JP63150281A 1988-06-20 1988-06-20 半導体メモリ Granted JPH01152661A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63150281A JPH01152661A (ja) 1988-06-20 1988-06-20 半導体メモリ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63150281A JPH01152661A (ja) 1988-06-20 1988-06-20 半導体メモリ

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP57192478A Division JPS5982761A (ja) 1982-11-04 1982-11-04 半導体メモリ

Publications (2)

Publication Number Publication Date
JPH01152661A JPH01152661A (ja) 1989-06-15
JPH0577342B2 true JPH0577342B2 (enrdf_load_stackoverflow) 1993-10-26

Family

ID=15493544

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63150281A Granted JPH01152661A (ja) 1988-06-20 1988-06-20 半導体メモリ

Country Status (1)

Country Link
JP (1) JPH01152661A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4541860B2 (ja) 2004-12-08 2010-09-08 キヤノン株式会社 画像形成装置及び画像形成方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5948547B2 (ja) * 1976-06-18 1984-11-27 株式会社日立製作所 半導体装置の製法
JPS53112686A (en) * 1977-03-14 1978-10-02 Oki Electric Ind Co Ltd Manufacture for semiconductor device
JPS5681968A (en) * 1979-12-07 1981-07-04 Toshiba Corp Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPH01152661A (ja) 1989-06-15

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