JPH0577182B2 - - Google Patents

Info

Publication number
JPH0577182B2
JPH0577182B2 JP61022421A JP2242186A JPH0577182B2 JP H0577182 B2 JPH0577182 B2 JP H0577182B2 JP 61022421 A JP61022421 A JP 61022421A JP 2242186 A JP2242186 A JP 2242186A JP H0577182 B2 JPH0577182 B2 JP H0577182B2
Authority
JP
Japan
Prior art keywords
wafer
gas
suction
ejector
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61022421A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62179741A (ja
Inventor
Atsushi Hatano
Nobuhiko Funabashi
Seiji Myaji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osaka Soda Co Ltd
Original Assignee
Daiso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daiso Co Ltd filed Critical Daiso Co Ltd
Priority to JP2242186A priority Critical patent/JPS62179741A/ja
Publication of JPS62179741A publication Critical patent/JPS62179741A/ja
Publication of JPH0577182B2 publication Critical patent/JPH0577182B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP2242186A 1986-02-04 1986-02-04 ウエハの吸着装置 Granted JPS62179741A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2242186A JPS62179741A (ja) 1986-02-04 1986-02-04 ウエハの吸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2242186A JPS62179741A (ja) 1986-02-04 1986-02-04 ウエハの吸着装置

Publications (2)

Publication Number Publication Date
JPS62179741A JPS62179741A (ja) 1987-08-06
JPH0577182B2 true JPH0577182B2 (enrdf_load_stackoverflow) 1993-10-26

Family

ID=12082211

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2242186A Granted JPS62179741A (ja) 1986-02-04 1986-02-04 ウエハの吸着装置

Country Status (1)

Country Link
JP (1) JPS62179741A (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5629954U (enrdf_load_stackoverflow) * 1979-08-10 1981-03-23

Also Published As

Publication number Publication date
JPS62179741A (ja) 1987-08-06

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