JPS62179741A - ウエハの吸着装置 - Google Patents

ウエハの吸着装置

Info

Publication number
JPS62179741A
JPS62179741A JP2242186A JP2242186A JPS62179741A JP S62179741 A JPS62179741 A JP S62179741A JP 2242186 A JP2242186 A JP 2242186A JP 2242186 A JP2242186 A JP 2242186A JP S62179741 A JPS62179741 A JP S62179741A
Authority
JP
Japan
Prior art keywords
wafer
ejector
vacuum
suction
suction device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2242186A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0577182B2 (enrdf_load_stackoverflow
Inventor
Atsushi Hatano
敦 波多野
Nobuhiko Funabashi
船橋　允彦
Seiji Miyaji
宮地　政治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KYUSHU DENSHI KINZOKU KK
Osaka Soda Co Ltd
Original Assignee
KYUSHU DENSHI KINZOKU KK
Osaka Soda Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KYUSHU DENSHI KINZOKU KK, Osaka Soda Co Ltd filed Critical KYUSHU DENSHI KINZOKU KK
Priority to JP2242186A priority Critical patent/JPS62179741A/ja
Publication of JPS62179741A publication Critical patent/JPS62179741A/ja
Publication of JPH0577182B2 publication Critical patent/JPH0577182B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP2242186A 1986-02-04 1986-02-04 ウエハの吸着装置 Granted JPS62179741A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2242186A JPS62179741A (ja) 1986-02-04 1986-02-04 ウエハの吸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2242186A JPS62179741A (ja) 1986-02-04 1986-02-04 ウエハの吸着装置

Publications (2)

Publication Number Publication Date
JPS62179741A true JPS62179741A (ja) 1987-08-06
JPH0577182B2 JPH0577182B2 (enrdf_load_stackoverflow) 1993-10-26

Family

ID=12082211

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2242186A Granted JPS62179741A (ja) 1986-02-04 1986-02-04 ウエハの吸着装置

Country Status (1)

Country Link
JP (1) JPS62179741A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5629954U (enrdf_load_stackoverflow) * 1979-08-10 1981-03-23

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5629954U (enrdf_load_stackoverflow) * 1979-08-10 1981-03-23

Also Published As

Publication number Publication date
JPH0577182B2 (enrdf_load_stackoverflow) 1993-10-26

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